Detection of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films prepared on LaNiO3 buffered metal substrates with Raman spectroscopy

2006 ◽  
Vol 88 (15) ◽  
pp. 152906 ◽  
Author(s):  
Jinrong Cheng ◽  
Liang He ◽  
Shengwen Yu ◽  
Zhongyan Meng
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Residual Stresses ◽  
Metal Substrates

Determination of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films with Raman spectroscopy

2001 ◽  
Vol 79 (25) ◽  
pp. 4112-4114 ◽  
Author(s):  
Wei-Hua Xu ◽  
Dexin Lu ◽  
Tong-Yi Zhang
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Residual Stresses

Fem Simulation of Micro-Rotating-Structures and Their Applications in Measurement of Residual Stresses in Thin Films

1997 ◽  
Vol 505 ◽  
Author(s):  
Xin Zhang ◽  
Tong-Yi Zhang ◽  
Yitshak Zohar
Keyword(s):  
Thin Films ◽  
Residual Stresses ◽  
Fem Simulation ◽  
Sensitivity Factor ◽  
Local Measurement ◽  
Micro Structure ◽  
Micro Raman Spectroscopy ◽  
Before And After ◽  
Polysilicon Films ◽  
Simulation Results

ABSTRACTFEM simulation of micro-rotating-structures was performed for local measurement of residual stresses in thin films. A sensitivity factor is introduced, studied and tabulated from the simulation results. The residual stress can be evaluated from the rotating deflection, the lengths of rotating and fixed beams, and the sensitivity factor. The micro-structure technique was applied to measure residual stresses in both silicon nitride and polysilicon thin films, before and after rapid thermal annealing (RTA), and further confirmed by wafer curvature method. Residual stresses in polysilicon films at different RTA stages were also characterized by micro-Raman spectroscopy (MRS). The experimental results indicate that micro-rotating-structures indeed have the ability to measure spatially and locally residual stresses in MEMS thin films with appropriate sensitivities.

scholarly journals Impact of changes in bond structure on ovonic threshold switching behaviour in GeSe2

2021 ◽  
Vol 9 (1) ◽  
pp. 117-126
Author(s):  
Jonas Keukelier ◽  
Karl Opsomer ◽  
Thomas Nuytten ◽  
Stefanie Sergeant ◽  
Wouter Devulder ◽  
...  
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Electrical Behaviour ◽  
Electrical Measurements ◽  
Threshold Switching ◽  
Switching Behaviour

Raman spectroscopy and electrical measurements are performed on sputtered GexSe1−x thin films to identify and link bond presence to electrical behaviour.

Enhanced waveguide Raman spectroscopy with thin films. Plenary lecture

The Analyst ◽  
1994 ◽  
Vol 119 (4) ◽  
pp. 491 ◽  
Author(s):  
S. Ellahi ◽  
R. E. Hester
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Plenary Lecture

scholarly journals Structural Changes in Doped Ge2Sb2Te5 Thin Films Studied by Raman Spectroscopy

2013 ◽  
Vol 44 ◽  
pp. 82-90 ◽  
Author(s):  
S. Kozyukhin ◽  
M. Veres ◽  
H.P. Nguyen ◽  
A. Ingram ◽  
V. Kudoyarova
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Structural Changes

scholarly journals Highly textured oxypnictide superconducting thin films on metal substrates

2014 ◽  
Vol 105 (17) ◽  
pp. 172602 ◽  
Author(s):  
Kazumasa Iida ◽  
Fritz Kurth ◽  
Masashi Chihara ◽  
Naoki Sumiya ◽  
Vadim Grinenko ◽  
...  
Keyword(s):  
Thin Films ◽  
Superconducting Thin Films ◽  
Metal Substrates

Broadband Coherent Anti-Stokes Raman Spectroscopy Characterization of Polymer Thin Films

2006 ◽  
Vol 60 (10) ◽  
pp. 1097-1102 ◽  
Author(s):  
Zachary D. Schultz ◽  
Marc C. Gurau ◽  
Lee J. Richter
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Polymer Thin Films ◽  
Anti Stokes

MgB2 Thin Films on Metal Substrates for Superconducting RF Cavity Applications

2013 ◽  
Vol 26 (5) ◽  
pp. 1563-1568 ◽  
Author(s):  
Chenggang Zhuang ◽  
Teng Tan ◽  
Alex Krick ◽  
Qingyu Lei ◽  
Ke Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Substrates ◽  
Rf Cavity ◽  
Superconducting Rf ◽  
Mgb2 Thin Films

High quality ISD MgO buffers on large scale, flexible metal substrates for RF applications of HTS thin films

2006 ◽  
Vol 19 (11) ◽  
pp. 1118-1123 ◽  
Author(s):  
T Zilbauer ◽  
P Berberich ◽  
A Lümkemann ◽  
K Numssen ◽  
T Wassner ◽  
...  
Keyword(s):  
Thin Films ◽  
Large Scale ◽  
High Quality ◽  
Metal Substrates ◽  
Rf Applications ◽  
Flexible Metal
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