Laser-induced structural modifications in nanocrystalline silicon/amorphous silicon dioxide superlattices

2006 ◽  
Vol 88 (14) ◽  
pp. 143117 ◽  
Author(s):  
B. V. Kamenev ◽  
H. Grebel ◽  
L. Tsybeskov
Keyword(s):  
Silicon Dioxide ◽  
Amorphous Silicon ◽  
Nanocrystalline Silicon ◽  
Structural Modifications ◽  
Amorphous Silicon Dioxide

Nanocrystalline Silicon/Amorphous Silicon Dioxide Superlattices

1997 ◽  
Vol 485 ◽  
Author(s):  
Philippe M. Fauchet ◽  
Leonid Tsybeskov ◽  
Margit Zacharias ◽  
Karl Hirschman
Keyword(s):  
Silicon Dioxide ◽  
Amorphous Silicon ◽  
Layer Thickness ◽  
Rf Sputtering ◽  
Nanocrystalline Silicon ◽  
Thin Layers ◽  
Recrystallization Temperature ◽  
X Ray ◽  
Amorphous Silicon Dioxide ◽  
Step Procedure

AbstractThin layers made of densely packed silicon nanocrystals sandwiched between amorphous silicon dioxide layers have been manufactured and characterized. An amorphous silicon/amorphous silicon dioxide superlattice is first grown by CVD or RF sputtering. The a-Si layers are recrystallized in a two-step procedure (nucleation + growth) to form layers of nearly identical nanocrystals whose diameter is given by the initial a-Si layer thickness. The recrystallization is monitored using a variety of techniques, including TEM, X-Ray, Raman, and luminescence spectroscopies. When the a-Si layer thickness decreases (from 25 nm to 2.5 nm) or the a-SiO2 layer thickness increases (from 1.5 nm to 6 nm), the recrystallization temperature increases dramatically compared to that of a single a-Si film. The removal of the a-Si tissue present between the nanocrystals, the passivation of the nanocrystals, and their doping are discussed.

scholarly journals Сравнительный фотолюминесцентный анализ точечных дефектов в SiO-=SUB=-2-=/SUB=-, индуцированных имплантацией ионов Ar-=SUP=-+-=/SUP=- и облучением нейтронами

2019 ◽  
Vol 45 (5) ◽  
pp. 24
Author(s):  
И.П. Щербаков ◽  
А.Е. Чмель
Keyword(s):  
Silicon Dioxide ◽  
Amorphous Silicon ◽  
Point Defects ◽  
Photoluminescence Spectrum ◽  
Thermal Neutrons ◽  
Optical Transitions ◽  
Atomic Collisions ◽  
Amorphous Silicon Dioxide ◽  
Spectral Bands ◽  
Atomic Nuclei

AbstractThe introduction of Si^+ ions and ions of other elements into amorphous silicon dioxide during their interaction causes damage to the structural bonds, which is observed in the vibrational spectral bands. Pure SiO_2 has no optical transitions but the bands of induced point defects appear in the photoluminescence spectrum when ions/neutrons are introduced. The generation of photoluminescence-active defects by fluxes of Ar^+ ion and thermal neutrons is compared. It is shown that the nature of damage to the structure is associated with both the specifics of the synthesis/processing of the material and the features of the interaction between the substance and ions (atomic collisions) and neutrons (collisions with atomic nuclei).

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