Unexpectedly high sputtering yield of carbon at grazing angle of incidence ion bombardment

2005 ◽  
Vol 98 (2) ◽  
pp. 024901 ◽  
Author(s):  
A. Barna ◽  
M. Menyhard ◽  
L. Kotis ◽  
Gy. J. Kovacs ◽  
G. Radnoczi ◽  
...  
Keyword(s):  
Grazing Angle ◽  
Ion Bombardment ◽  
Angle Of Incidence ◽  
Sputtering Yield

Interface broadening due to Ar+ ion bombardment measured on Co/Cu multilayer at grazing angle of incidence

2003 ◽  
Vol 21 (3) ◽  
pp. 553-557 ◽  
Author(s):  
A. Barna ◽  
M. Menyhard ◽  
G. Zsolt ◽  
A. Koos ◽  
A. Zalar ◽  
...  
Keyword(s):  
Grazing Angle ◽  
Ion Bombardment ◽  
Angle Of Incidence

Relative sputter rate measured in Cu/Co multilayer using Ar+ ion bombardment at grazing angle of incidence

2003 ◽  
Vol 21 (1) ◽  
pp. 196-200 ◽  
Author(s):  
A. Barna ◽  
M. Menyhard ◽  
G. Zsolt ◽  
N. Q. Khanh ◽  
A. Zalar ◽  
...  
Keyword(s):  
Grazing Angle ◽  
Ion Bombardment ◽  
Angle Of Incidence

Fractal and Non-Fractal Surfaces in Ion Sputtering

1995 ◽  
Vol 407 ◽  
Author(s):  
A.-L. Barabási ◽  
R. Cuerno
Keyword(s):  
Nonlinear Equation ◽  
Penetration Depth ◽  
Experimental Studies ◽  
Ion Bombardment ◽  
Physical Parameters ◽  
Angle Of Incidence ◽  
Ion Sputtering ◽  
Scaling Properties ◽  
Fractal Surfaces ◽  
Experimental Parameters

ABSTRACTRecently a number of experimental studies focusing on the scaling properties of surfaces eroded by ion bombardment provided apparently contradictory results. A number of experiments report the observation of self-affine fractal surfaces, while others provide evidence about the development of a non-fractal periodic ripple structure. To explain these discrepancies, here we derive a stochastic nonlinear equation that describes the evolution and scaling properties of surfaces eroded by ion bombardment. The coefficients appearing in the equation can be calculated explicitly in terms of the physical parameters characterizing the sputtering process. We find that transitions may take place between various scaling behaviors when experimental parameters, such as the angle of incidence of the incoming ions or their average penetration depth, are varied.

Low-Energy Electron Diffraction from Ag(111): Intensity-versus-Energy Curves and Absolute Intensity of the (00) Beam

1970 ◽  
Vol 25 (11) ◽  
pp. 1567-1578 ◽  
Author(s):  
Max G. Lagally
Keyword(s):  
Geometric Model ◽  
Surface Condition ◽  
Grazing Angle ◽  
Surface Preparation ◽  
Incident Beam ◽  
Absolute Intensity ◽  
Angle Of Incidence ◽  
Faraday Cage ◽  
Scattering Correction ◽  
Low Energies

The intensity of the (00) beam of a (111) surface of Ag has been measured with a Faraday cage as a function of the energy of the incident beam (10 < E < 280 eV), the grazing angle of incidence (46.5° < φ < 83.5°), two azimuths differing by 180°, and the temperature. The I vs E curves, when compared with data for Ag ( 111 ) of other workers who have used different methods of surface preparation, show good agreement in the structure over the whole range of incident angles, indicating that LEED is not strongly sensitive to surface condition. The I vs E curves for the two azimuths are identical, a necessary result of the reciprocity theorem. For comparison with the I vs E structure, a complete 3-beam geometric model is used. This differs from a simple Ewald construction in that it considers also the Bragg conditions between intermediate beams and the final beam. It also requires that there be no difference in the effect of intermediate forward and backward scattered beams. It is shown that the number of possible beams is much too large even at low energies to make positive identification of any structure in the I vs E curves. A comparison with a rigorous multiple-scattering theory yields agreement in the number and position of peaks, but not in heights and widths of peaks. The possibility of comparison of absolute intensities in theory and experiment is investigated and an attempt is made to remove the major differences. Intensity vs temperature measurements are made at closely spaced energies in order to extract the rigid-lattice scattering. Correction of this intensity for surface plasma losses leads finally to maximum scattered intensities of 2% at 100 eV, 10% at 60 eV, and up to 40% at energies below 20 eV.

Noble-gas ion sputtering yield of gold and copper: Dependence on the energy and angle of incidence of the projectiles

1987 ◽  
Vol 35 (5) ◽  
pp. 2198-2204 ◽  
Author(s):  
A. Oliva-Florio ◽  
R. A. Baragiola ◽  
M. M. Jakas ◽  
E. V. Alonso ◽  
J. Ferrón
Keyword(s):  
Noble Gas ◽  
Angle Of Incidence ◽  
Ion Sputtering ◽  
Sputtering Yield

The Influence of Ion Bombardment on the Surface Composition of 70 wt% Cu-30 wt% Zn Alpha-Brass

1991 ◽  
Vol 223 ◽  
Author(s):  
Vjekoslav Franetovic
Keyword(s):  
Surface Composition ◽  
Ion Beam ◽  
Ion Bombardment ◽  
Characteristic Surface ◽  
Foil Surface ◽  
Ion Milling ◽  
Long Time ◽  
Sputtering Yield ◽  
Short Time ◽  
Alpha Brass

ABSTRACTThe short time ion bombardment during ion milling resulted in a dramatic change in the surface composition of alpha-brass, selectively removing up to 2/3 of the Zn atoms during the first 5 to 10 minutes of ion milling. This differential sputtering occurred at various ion beam energies and at target temperatures as low as −196°C (LN2 temperature). The effect of differential sputtering completely disappeared after ion milling times in excess of three hours. Such a dramatic change in composition could not be attributed either to a difference in sputtering yield or to different ion milling conditions. It was shown that under constant ion milling conditions this differential sputtering depends strongly and only on the condition of the foil surface. The unexpected disappearance of the effect of differential sputtering with time was attributed to stabilization of a characteristic surface topography produced by long time ion bombardment.

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