Vapor deposition of strongly bonded hydrocarbon films on diamondlike carbon surfaces

2005 ◽  
Vol 97 (10) ◽  
pp. 10P307 ◽  
Author(s):  
Junho Choi ◽  
Takahisa Kato ◽  
Masami Ikeyama
Keyword(s):  
Vapor Deposition ◽  
Hydrocarbon Films ◽  
Diamondlike Carbon ◽  
Carbon Surfaces

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

Effect of long duration UV irradiation on diamondlike carbon surfaces in the presence of a hydrocarbon gaseous atmosphere

2010 ◽  
Vol 108 (11) ◽  
pp. 114915 ◽  
Author(s):  
A. Riedo ◽  
P. Wahlström ◽  
J. A. Scheer ◽  
P. Wurz ◽  
M. Tulej
Keyword(s):  
Uv Irradiation ◽  
Gaseous Atmosphere ◽  
Long Duration ◽  
Diamondlike Carbon ◽  
Carbon Surfaces

Scattering of neutral hydrogen at energies less than 1 keV from tungsten and diamondlike carbon surfaces

2009 ◽  
Vol 27 (5) ◽  
pp. 1188-1195 ◽  
Author(s):  
Patrick P. Hughes ◽  
Michael A. Coplan ◽  
Jeffery N. DeFazio ◽  
Dennis J. Chornay ◽  
Michael R. Collier ◽  
...  
Keyword(s):  
Neutral Hydrogen ◽  
Diamondlike Carbon ◽  
Carbon Surfaces

Correlation of molecular hydrogen dissociation and the film quality of diamondlike carbon in plasma enhanced chemical vapor deposition

1995 ◽  
Vol 66 (23) ◽  
pp. 3152-3154 ◽  
Author(s):  
R. C. Cheshire ◽  
W. G. Graham ◽  
T. Morrow ◽  
V. Kornas ◽  
H. F. Döbele ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Molecular Hydrogen ◽  
Chemical Vapor ◽  
Hydrogen Dissociation ◽  
Diamondlike Carbon
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