Characterization of a laser-produced plasma source for a laboratory EUV reflectometer

2003 ◽  
Author(s):  
Frank Scholze ◽  
Frank Scholz ◽  
Johannes Tuemmler ◽  
Gerhard Ulm ◽  
Herbert Legall ◽  
...  
Keyword(s):  
Plasma Source ◽  
Laser Produced Plasma

Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

2004 ◽  
Vol 75 (11) ◽  
pp. 4981-4988 ◽  
Author(s):  
H. Legall ◽  
H. Stiel ◽  
U. Vogt ◽  
H. Schönnagel ◽  
P.-V. Nickles ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Spectral Characterization ◽  
Laser Produced Plasma

scholarly journals Merits of microwave plasmas for optical emission spectrometry – characterization of an axially viewed microwave-sustained, inductively coupled, atmospheric-pressure plasma (MICAP)

2020 ◽  
Vol 35 (10) ◽  
pp. 2369-2377
Author(s):  
Helmar Wiltsche ◽  
Matthias Wolfgang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Source ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Icp Oes ◽  
Microwave Plasmas ◽  
Inductively Coupled

The MICAP is a microwave driven plasma source employing nitrogen as the plasma gas. In this work we compare LODs and LOQs obtained in axial viewing with those obtained by ICP-OES and evaluate the effect of air instead of nitrogen as the plasma gas.

Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source

2014 ◽  
Vol 39 (7) ◽  
pp. 1953 ◽  
Author(s):  
Krzysztof M. Nowak ◽  
Takeshi Ohta ◽  
Takashi Suganuma ◽  
Junichi Fujimoto ◽  
Hakaru Mizoguchi ◽  
...  
Keyword(s):  
Planar Waveguide ◽  
Plasma Source ◽  
Nanosecond Pulse ◽  
Uv Laser ◽  
Pulse Amplification ◽  
Laser Produced Plasma ◽  
Extreme Uv

A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source

1992 ◽  
Vol 3 (4) ◽  
pp. 283-299
Author(s):  
E. M. Gullikson ◽  
J. H. Underwood ◽  
P. C. Batson ◽  
V. Nikitin
Keyword(s):  
Plasma Source ◽  
X Ray ◽  
Laser Produced Plasma

scholarly journals Characterization of hydrogen plasma in a permanent ring magnet based helicon plasma source for negative ion source research

2019 ◽  
Vol 61 (6) ◽  
pp. 065003 ◽  
Author(s):  
A Pandey ◽  
Debrup Mukherjee ◽  
Dipshikha Borah ◽  
M Bandyopadhyay ◽  
Himanshu Tyagi ◽  
...  
Keyword(s):  
Hydrogen Plasma ◽  
Plasma Source ◽  
Ion Source ◽  
Negative Ion ◽  
Helicon Plasma ◽  
Ring Magnet
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