scholarly journals Structure adjustment during high-deposition-rate growth of microcrystalline silicon solar cells

2004 ◽  
Vol 85 (14) ◽  
pp. 2839-2841 ◽  
Author(s):  
Y. Mai ◽  
S. Klein ◽  
X. Geng ◽  
F. Finger
Keyword(s):  
Solar Cells ◽  
Deposition Rate ◽  
Silicon Solar Cells ◽  
High Deposition Rate ◽  
Microcrystalline Silicon ◽  
Structure Adjustment

scholarly journals N-type window layer and its application in high deposition rate microcrystalline silicon solar cells

2009 ◽  
Vol 58 (7) ◽  
pp. 5041
Author(s):  
Zhang Xiao-Dan ◽  
Zhao Ying ◽  
Sun Fu-He ◽  
Wang Shi-Feng ◽  
Han Xiao-Yan ◽  
...  
Keyword(s):  
Solar Cells ◽  
Deposition Rate ◽  
Window Layer ◽  
Silicon Solar Cells ◽  
High Deposition Rate ◽  
Microcrystalline Silicon

scholarly journals Ultra-thin film microcrystalline silicon with high deposition rate and its application in tandem silicon solar cells

2015 ◽  
Vol 64 (22) ◽  
pp. 228801
Author(s):  
Bai Li-Sha ◽  
Li Tian-Tian ◽  
Liu Bo-Fei ◽  
Huang Qian ◽  
Li Bao-Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Deposition Rate ◽  
Silicon Solar Cells ◽  
High Deposition Rate ◽  
Microcrystalline Silicon ◽  
Ultra Thin Film

Microcrystalline Silicon Materials and Solar Cells with High Deposition Rate

2008 ◽  
pp. 1243-1246
Author(s):  
Xiaoyan Han ◽  
Xiaodan Zhang ◽  
Guofu Hou ◽  
Qunchao Guo ◽  
Yujie Yuan ◽  
...  
Keyword(s):  
Solar Cells ◽  
Deposition Rate ◽  
High Deposition Rate ◽  
Microcrystalline Silicon ◽  
Silicon Materials

Controlling Structural Evolution by VHF Power Profiling Technique for High-efficiency Microcrystalline Silicon Solar Cells at High Deposition Rate

2009 ◽  
Vol 1153 ◽  
Author(s):  
Guofu Hou ◽  
Xiaoyan Han ◽  
Changchun Wei ◽  
Xiaodan Zhang ◽  
Guijun Li ◽  
...  
Keyword(s):  
Solar Cells ◽  
Solar Cell ◽  
Deposition Rate ◽  
High Efficiency ◽  
Structural Evolution ◽  
High Rate ◽  
High Deposition Rate ◽  
Microcrystalline Silicon ◽  
Solar Cell Performance ◽  
Power Profiling

AbstractHigh rate deposition of hydrogenated microcrystalline silicon (μc-Si:H) films and solar cells were prepared by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) process in a high power and high pressure regime. The experiment results demonstrate that in high-rate deposited μc-Si:H films, the structural evolution is much more dramatic than that in low-rate deposited μc-Si:H films. A novel VHF power profiling technique, which was designed by dynamically decreasing the VHF power step by step during the deposition of μc-Si:H intrinsic layers, has been developed to control the structural evolution along the growth direction. Another advantage of this VHF power profiling technique is the reduced ion bombardments on growth surface because of decreasing the VHF power. Using this method, a significant improvement in the solar cell performance has been achieved. A high conversion efficiency of 9.36% (Voc=542mV, Jsc=25.4mA/cm2, FF=68%) was obtained for a single junction μc-Si:H p-i-n solar cell with i-layer deposited at deposition rate over 10 �/s.

High-deposition-rate amorphous silicon solar cells: silane or disilane?

Solar Cells ◽  
1991 ◽  
Vol 30 (1-4) ◽  
pp. 271-275 ◽  
Author(s):  
D.S. Shen ◽  
H. Chatham ◽  
P.K. Bhat
Keyword(s):  
Solar Cells ◽  
Amorphous Silicon ◽  
Deposition Rate ◽  
Silicon Solar Cells ◽  
High Deposition Rate

High deposition rate preparation of amorphous silicon solar cells by rf glow discharge decomposition of disilane

1984 ◽  
Vol 55 (2) ◽  
pp. 560-564 ◽  
Author(s):  
Jean Kenne ◽  
Yutaka Ohashi ◽  
Tsutomu Matsushita ◽  
Makoto Konagai ◽  
Kiyoshi Takahashi
Keyword(s):  
Solar Cells ◽  
Glow Discharge ◽  
Amorphous Silicon ◽  
Deposition Rate ◽  
Silicon Solar Cells ◽  
High Deposition Rate ◽  
Rf Glow Discharge
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