Structural, optical, and acoustic characterization of high-quality AlN thick films sputtered on Al2O3(0001) at low temperature for GHz-band electroacoustic devices applications
1994 ◽
Vol 34
(1-4)
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pp. 549-555
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Keyword(s):
2004 ◽
Vol 22
(6)
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pp. 2419-2423
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2012 ◽
Vol 05
(03)
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pp. 1250029
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2015 ◽
Vol 54
(8)
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pp. 081001
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2004 ◽
Vol 384
(4-6)
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pp. 246-250
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