Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach

2004 ◽  
Vol 11 (8) ◽  
pp. 4081-4087 ◽  
Author(s):  
P. Chabert ◽  
J.-L. Raimbault ◽  
J.-M. Rax ◽  
A. Perret
Keyword(s):  
Standing Wave ◽  
High Frequency ◽  
Wave Effect ◽  
Self Consistent ◽  
Dielectric Lens ◽  
Capacitive Discharges ◽  
Consistent Approach

Standing wave and skin effects in large-area, high-frequency capacitive discharges

2002 ◽  
Vol 11 (3) ◽  
pp. 283-293 ◽  
Author(s):  
M A Lieberman ◽  
J P Booth ◽  
P Chabert ◽  
J M Rax ◽  
M M Turner
Keyword(s):  
Standing Wave ◽  
High Frequency ◽  
Large Area ◽  
Capacitive Discharges

Erratum to: On a self-consistent approach to a bose model near the criticality

1981 ◽  
Vol 32 (2) ◽  
pp. 39-44 ◽  
Author(s):  
L. S. Campana ◽  
M. D’Ambrosio ◽  
L. De Cesaee
Keyword(s):  
Self Consistent ◽  
Consistent Approach

scholarly journals Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

2017 ◽  
Vol 35 (5) ◽  
pp. 05C311 ◽  
Author(s):  
Emi Kawamura ◽  
De-Qi Wen ◽  
Michael A. Lieberman ◽  
Allan J. Lichtenberg
Keyword(s):  
Dielectric Layer ◽  
High Frequency ◽  
Capacitive Discharges
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