Low‐Energy Sputtering Yields by Resonance Absorption and Emission Spectroscopic Methods

1964 ◽  
Vol 35 (12) ◽  
pp. 3575-3582 ◽  
Author(s):  
W. C. Kreye
Keyword(s):  
Resonance Absorption ◽  
Low Energy ◽  
Spectroscopic Methods ◽  
Absorption And Emission ◽  
Sputtering Yields

Sputtering yields of Ru, Mo, and Si under low energy Ar+ bombardment

2009 ◽  
Vol 106 (5) ◽  
pp. 054902 ◽  
Author(s):  
Shiou-Min Wu ◽  
Robbert van de Kruijs ◽  
Erwin Zoethout ◽  
Fred Bijkerk
Keyword(s):  
Low Energy ◽  
Sputtering Yields

Low‐Energy Ar+ Sputtering Yields of Solid and Liquid Tin

1970 ◽  
Vol 41 (12) ◽  
pp. 4953-4957 ◽  
Author(s):  
R. C. Krutenat ◽  
C. Panzera
Keyword(s):  
Low Energy ◽  
Sputtering Yields ◽  
Liquid Tin

Sputtering Yields for Low Energy He+‐, Kr+‐, and Xe+‐Ion Bombardment

1962 ◽  
Vol 33 (5) ◽  
pp. 1842-1845 ◽  
Author(s):  
D. Rosenberg ◽  
G. K. Wehner
Keyword(s):  
Ion Bombardment ◽  
Low Energy ◽  
Sputtering Yields

scholarly journals Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System

Shinku ◽  
2007 ◽  
Vol 50 (3) ◽  
pp. 217-219 ◽  
Author(s):  
Kiyohiro HINE ◽  
Satoru YOSHIMURA ◽  
Masato KIUCHI ◽  
Satoshi HAMAGUCHI
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Beam System ◽  
Sputtering Yields
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