scholarly journals Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System

Shinku ◽  
2007 ◽  
Vol 50 (3) ◽  
pp. 217-219 ◽  
Author(s):  
Kiyohiro HINE ◽  
Satoru YOSHIMURA ◽  
Masato KIUCHI ◽  
Satoshi HAMAGUCHI
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Beam System ◽  
Sputtering Yields

Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System

2007 ◽  
Vol 46 (No. 46) ◽  
pp. L1132-L1134 ◽  
Author(s):  
Kiyohiro Hine ◽  
Satoru Yoshimura ◽  
Kazumasa Ikuse ◽  
Masato Kiuchi ◽  
Jun Hashimoto ◽  
...  
Keyword(s):  
Magnesium Oxide ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System ◽  
Sputtering Yields

scholarly journals Measurement of Au sputtering yields by Ar and He ions with a low-energy mass selected ion beam system

2008 ◽  
Vol 106 ◽  
pp. 012019 ◽  
Author(s):  
K Hine ◽  
S Yoshimura ◽  
K Ikuse ◽  
M Kiuchi ◽  
S Hamaguchi
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Beam System ◽  
Sputtering Yields

Low‐energy ion beam system for materials studies

1982 ◽  
Vol 53 (5) ◽  
pp. 610-614
Author(s):  
G. C. Nelson ◽  
J. A. Borders ◽  
M. C. Oborny
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Beam System

scholarly journals Fabrication of a Newly Developed Low-Energy Focused Ion Beam System and Its Application to the Maskless Selective Deposition on Microarea.

Shinku ◽  
1992 ◽  
Vol 35 (11) ◽  
pp. 899-904 ◽  
Author(s):  
Kangsa PAK ◽  
Tetsuya SHIMOMURA ◽  
Isao SAITOH ◽  
Hiroo YONEZU
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Selective Deposition ◽  
Beam System

scholarly journals Development of low energy ion beam system for space charge compensation experiments

2008 ◽  
Vol 79 (2) ◽  
pp. 02B712 ◽  
Author(s):  
Mitsuaki Takeuchi ◽  
Yasuhito Gotoh ◽  
Hiroshi Tsuji ◽  
Junzo Ishikawa ◽  
Shigeki Sakai
Keyword(s):  
Space Charge ◽  
Ion Beam ◽  
Charge Compensation ◽  
Low Energy ◽  
Beam System

Direct Ga deposition by low-energy focused ion-beam system

1997 ◽  
Vol 386 (1-3) ◽  
pp. 254-258 ◽  
Author(s):  
T. Chikyow ◽  
N. Koguchi ◽  
A. Shikanai
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System

Low energy focused ion beam system design

2006 ◽  
Vol 24 (4) ◽  
pp. 1055-1066 ◽  
Author(s):  
Michael Rauscher ◽  
Erich Plies
Keyword(s):  
System Design ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System

A low energy ion beam system for thermal evolution measurements of damage in ion bombarded single crystals

Vacuum ◽  
1984 ◽  
Vol 34 (1-2) ◽  
pp. 239-244 ◽  
Author(s):  
P Bailey ◽  
SE Donnelly ◽  
DC Ingram ◽  
DG Armour
Keyword(s):  
Single Crystals ◽  
Thermal Evolution ◽  
Ion Beam ◽  
Low Energy ◽  
Beam System
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