Experimental Determination of the Shape of Metal—Insulator—Metal Potential Barriers

1964 ◽  
Vol 35 (7) ◽  
pp. 2151-2151 ◽  
Author(s):  
D. V. Geppert
Keyword(s):  
Experimental Determination ◽  
Metal Insulator ◽  
Potential Barriers ◽  
Metal Insulator Metal

scholarly journals Assessment of dielectric charging in micro-electro-mechanical system capacitive switches

2013 ◽  
Vol 26 (3) ◽  
pp. 239-245
Author(s):  
M. Koutsoureli ◽  
L. Michalas ◽  
G. Papaioannou
Keyword(s):  
Mechanical System ◽  
Material Properties ◽  
Micro Electro Mechanical System ◽  
Capacitive Switches ◽  
Metal Insulator ◽  
Dielectric Charging ◽  
Metal Insulator Metal ◽  
Simultaneous Assessment

The assessment of dielectric charging in MEMS capacitive switches is investigated. The information can be obtained only from simultaneous assessment of Metal-Insulator-Metal capacitance and MEMS capacitive switches the former allowing the determination of material properties and the latter of the device.

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