A particle-in-cell fluid model for radio frequency glow discharges

1993 ◽  
Vol 7 (3) ◽  
pp. 363
Author(s):  
Chihwen ‘‘Chris’’ Li ◽  
Chwan-Hwa ‘‘John’’ Wu
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Particle In Cell ◽  
Glow Discharges

Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model

1994 ◽  
Vol 64 (14) ◽  
pp. 1780-1782 ◽  
Author(s):  
P. M. Meijer ◽  
J. D. P. Passchier ◽  
W. J. Goedheer ◽  
J. Bezemer ◽  
W. G. J. H. M. van Sark
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

Frequency effects in capacitively coupled radio-frequency glow discharges: a comparison between a 2-D fluid model and experiments

1995 ◽  
Vol 23 (4) ◽  
pp. 644-649 ◽  
Author(s):  
W.J. Goedheer ◽  
P.M. Meijer ◽  
J. Bezemer ◽  
J. Diederick ◽  
J.D.P. Passchier ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

Continuum modeling of argon radio frequency glow discharges

1987 ◽  
Vol 50 (9) ◽  
pp. 492-494 ◽  
Author(s):  
Albert D. Richards ◽  
Brian E. Thompson ◽  
Herbert H. Sawin
Keyword(s):  
Radio Frequency ◽  
Continuum Modeling ◽  
Glow Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Particle-in-cell simulation of glow discharges in complex geometries

1995 ◽  
Vol 23 (4) ◽  
pp. 769-779 ◽  
Author(s):  
G. Lapenta ◽  
F. Iinoya ◽  
J.U. Brackbill
Keyword(s):  
Complex Geometries ◽  
Particle In Cell ◽  
Glow Discharges ◽  
Cell Simulation

Measurements in silane radio frequency glow discharges using a tuned and heated Langmuir probe

1993 ◽  
Vol 74 (8) ◽  
pp. 4899-4902 ◽  
Author(s):  
Quixun Lin ◽  
Xuangying Lin ◽  
Yunpeng Yu ◽  
Hong Wang ◽  
Jiayi Chen
Keyword(s):  
Radio Frequency ◽  
Langmuir Probe ◽  
Glow Discharges
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