Reduction of grown-in defects by vacancy-assisted oxygen precipitation in high density dynamic random access memory

2003 ◽  
Vol 83 (23) ◽  
pp. 4863-4865 ◽  
Author(s):  
Il-Gweon Kim ◽  
Jae-Sun Kwon
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
High Density ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Oxygen Precipitation ◽  
Density Dynamic

Low Temperature Chemical Vapor Deposition of (Ba, Sr)TiO3 Thin Films for High Density Dynamic Random Access Memory Capacitors

1999 ◽  
Vol 38 (Part 2, No. 2B) ◽  
pp. L195-L198 ◽  
Author(s):  
Jae-Hyun Joo ◽  
Jong-Bum Park ◽  
Younsoo Kim ◽  
Kong-Soo Lee ◽  
Jun-Sik Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Random Access ◽  
Chemical Vapor ◽  
Random Access Memory ◽  
High Density ◽  
Access Memory ◽  
Density Dynamic
Sign in / Sign up

Export Citation Format

Share Document