scholarly journals Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

2003 ◽  
Vol 94 (12) ◽  
pp. 7422 ◽  
Author(s):  
S. J. You ◽  
H. C. Kim ◽  
C. W. Chung ◽  
H. Y. Chang ◽  
J. K. Lee
Keyword(s):  
Power Dissipation ◽  
Driving Frequency ◽  
Mode Transition ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma

2012 ◽  
Vol 101 (4) ◽  
pp. 043705 ◽  
Author(s):  
X. Y. Liu ◽  
J. T. Hu ◽  
J. H. Liu ◽  
Z. L. Xiong ◽  
D. W. Liu ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Mode Transition ◽  
Production Mechanism ◽  
Discharge Mode ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Influence of driving frequency on oxygen atom density in O2radio frequency capacitively coupled plasma

2004 ◽  
Vol 37 (19) ◽  
pp. 2670-2676 ◽  
Author(s):  
Takeshi Kitajima ◽  
Kouichi Noro ◽  
Toshiki Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Oxygen Atom ◽  
Driving Frequency ◽  
Capacitively Coupled ◽  
Atom Density ◽  
Capacitively Coupled Plasma

Dependence of Driving Frequency on Capacitively Coupled Plasma in CF4

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4416-4422 ◽  
Author(s):  
Sumie Segawa ◽  
Masaru Kurihara ◽  
Nobuhiko Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Driving Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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