The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma

2013 ◽  
Vol 547 ◽  
pp. 289-292 ◽  
Author(s):  
HunSu Lee ◽  
EunAe Kim ◽  
YunSeong Lee ◽  
HongYoung Chang
Keyword(s):  
Hole Diameter ◽  
Driving Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

2003 ◽  
Vol 94 (12) ◽  
pp. 7422 ◽  
Author(s):  
S. J. You ◽  
H. C. Kim ◽  
C. W. Chung ◽  
H. Y. Chang ◽  
J. K. Lee
Keyword(s):  
Power Dissipation ◽  
Driving Frequency ◽  
Mode Transition ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Influence of driving frequency on oxygen atom density in O2radio frequency capacitively coupled plasma

2004 ◽  
Vol 37 (19) ◽  
pp. 2670-2676 ◽  
Author(s):  
Takeshi Kitajima ◽  
Kouichi Noro ◽  
Toshiki Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Oxygen Atom ◽  
Driving Frequency ◽  
Capacitively Coupled ◽  
Atom Density ◽  
Capacitively Coupled Plasma

Dependence of Driving Frequency on Capacitively Coupled Plasma in CF4

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4416-4422 ◽  
Author(s):  
Sumie Segawa ◽  
Masaru Kurihara ◽  
Nobuhiko Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Driving Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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