Fabrication and characterization of high-quality waveguide-mode resonant optical filters

2003 ◽  
Vol 83 (16) ◽  
pp. 3248-3250 ◽  
Author(s):  
P. S. Priambodo ◽  
T. A. Maldonado ◽  
R. Magnusson
Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.


2011 ◽  
Vol 520 (1) ◽  
pp. 445-447 ◽  
Author(s):  
Hao Zheng ◽  
Z.X. Mei ◽  
Z.Q. Zeng ◽  
Y.Z. Liu ◽  
L.W. Guo ◽  
...  

2002 ◽  
Vol 15 (12) ◽  
pp. 1706-1710 ◽  
Author(s):  
A Ogawa ◽  
N Inoue ◽  
T Sugano ◽  
S Adachi ◽  
K Suzuki ◽  
...  

2016 ◽  
Vol 2016 (1) ◽  
pp. 000288-000292
Author(s):  
Timothy Clingenpeel ◽  
Arian Rahimi ◽  
Seahee Hwangbo ◽  
Yong-Kyu Yoon ◽  
Aric Shorey

Abstract This work presents the fabrication process, electrical characteristics, and circuit model of through glass via (TGV) structures consisting of TGV holes with each diameter of 100 μm and different conductors including copper and composite in the frequency range of 300 kHz to 20 GHz. The Cu/NiFe superlattice metaconductors in combination with high-quality glass (Corning SGW3) are intended to reduce radio-frequency losses especially in 10 GHz and above for next generation communication applications such as 5G communications. The measured results of the copper structure are compared to simulated results. Superlattice metaconductor results will be presented. Based on the simulation and measurement results, a circuit model is demonstrated.


2017 ◽  
Vol 8 (4) ◽  
pp. 720-726 ◽  
Author(s):  
Teng Ma ◽  
Qiwu Zhang ◽  
Daisuke Tadaki ◽  
Ayumi Hirano-Iwata ◽  
Michio Niwano

2012 ◽  
Vol 24 (17) ◽  
pp. 1472-1474 ◽  
Author(s):  
Xiao-Long Hu ◽  
Wen-Jie Liu ◽  
Guo-En Weng ◽  
Jiang-Yong Zhang ◽  
Xue-Qin Lv ◽  
...  

2010 ◽  
Vol 162 (2) ◽  
pp. 400-405 ◽  
Author(s):  
A. Emadi ◽  
H. Wu ◽  
S. Grabarnik ◽  
G. De Graaf ◽  
K. Hedsten ◽  
...  

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