Heteroepitaxial growth of CuInS2 thin films on sapphire by radio frequency reactive sputtering

2003 ◽  
Vol 83 (9) ◽  
pp. 1743-1745 ◽  
Author(s):  
Y. B. He ◽  
W. Kriegseis ◽  
B. K. Meyer ◽  
A. Polity ◽  
M. Serafin
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Heteroepitaxial Growth ◽  
Cuins2 Thin Films

Deposition of magnesium hydride thin films using radio frequency reactive sputtering

2011 ◽  
Vol 519 (18) ◽  
pp. 5949-5954 ◽  
Author(s):  
C. Platzer-Björkman ◽  
T. Mongstad ◽  
J.P. Mæhlen ◽  
A. Baldi ◽  
S. Karazhanov ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Magnesium Hydride

scholarly journals Tin nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 77 (12) ◽  
pp. 6641-6645 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Tin Nitride

scholarly journals Copper nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 78 (6) ◽  
pp. 4104-4107 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Copper Nitride

Highly (112)-Oriented CuInS2 Thin Films Deposited by a One-Stage RF Reactive Sputtering Process

2002 ◽  
Vol 41 (Part 2, No. 4B) ◽  
pp. L484-L486 ◽  
Author(s):  
Yunbin He ◽  
Thorsten Krämer ◽  
Ingo Österreicher ◽  
Angelika Polity ◽  
Ralf Gregor ◽  
...  
Keyword(s):  
Thin Films ◽  
Reactive Sputtering ◽  
One Stage ◽  
Cuins2 Thin Films

Deposition of CuInS2 thin films by RF reactive sputtering with a ZnO:Al buffer layer

2003 ◽  
Vol 64 (9-10) ◽  
pp. 2075-2079 ◽  
Author(s):  
Y.B. He ◽  
W. Kriegseis ◽  
T. Krämer ◽  
A. Polity ◽  
M. Hardt ◽  
...  
Keyword(s):  
Thin Films ◽  
Buffer Layer ◽  
Reactive Sputtering ◽  
Cuins2 Thin Films
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