The effect of different radio-frequency powers on characteristics of carbon-titanium nanocomposite thin films prepared by reactive sputtering

2018 ◽  
Vol 660 ◽  
pp. 899-906 ◽  
Author(s):  
Zih-Chen Hong ◽  
Hsiang-Chun Hsueh ◽  
Chong-Zan Wu ◽  
Sham-Tsong Shiue
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Nanocomposite Thin Films

Deposition of magnesium hydride thin films using radio frequency reactive sputtering

2011 ◽  
Vol 519 (18) ◽  
pp. 5949-5954 ◽  
Author(s):  
C. Platzer-Björkman ◽  
T. Mongstad ◽  
J.P. Mæhlen ◽  
A. Baldi ◽  
S. Karazhanov ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Magnesium Hydride

scholarly journals Tin nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 77 (12) ◽  
pp. 6641-6645 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Tin Nitride

scholarly journals Copper nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 78 (6) ◽  
pp. 4104-4107 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Copper Nitride

scholarly journals Crystal phase content-dependent functionality of dual phase SnO2–WO3nanocomposite filmsviacosputtering crystal growth

RSC Advances ◽  
2019 ◽  
Vol 9 (12) ◽  
pp. 6482-6493 ◽  
Author(s):  
Yuan-Chang Liang ◽  
Yu Chao
Keyword(s):  
Thin Films ◽  
Crystal Growth ◽  
Radio Frequency ◽  
Crystal Phase ◽  
Dual Phase ◽  
Phase Content ◽  
Nanocomposite Thin Films

In this study, crystalline SnO2–WO3nanocomposite thin films were grown through radio-frequency cosputtering of metallic Sn and ceramic WO3targets.

Heteroepitaxial growth of CuInS2 thin films on sapphire by radio frequency reactive sputtering

2003 ◽  
Vol 83 (9) ◽  
pp. 1743-1745 ◽  
Author(s):  
Y. B. He ◽  
W. Kriegseis ◽  
B. K. Meyer ◽  
A. Polity ◽  
M. Serafin
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Heteroepitaxial Growth ◽  
Cuins2 Thin Films
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