Improvement of discharge capacity of LiCoO2 thin-film cathodes deposited in trench structure by liquid-delivery metalorganic chemical vapor deposition

Sang-In Cho; Soon-Gil Yoon

doi:10.1063/1.1571958

Improvement of discharge capacity of LiCoO2 thin-film cathodes deposited in trench structure by liquid-delivery metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.1571958 ◽

2003 ◽

Vol 82 (19) ◽

pp. 3345-3347 ◽

Cited By ~ 22

Author(s):

Sang-In Cho ◽

Soon-Gil Yoon

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Discharge Capacity ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Trench Structure ◽

Metalorganic Chemical ◽

Liquid Delivery

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Ferroelectric SrBi2Ta2O9 thin film deposition at 550 °C by plasma-enhanced metalorganic chemical vapor deposition onto a metalorganic chemical vapor deposition platinum bottom electrode

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581554 ◽

1999 ◽

Vol 17 (1) ◽

pp. 83-87 ◽

Cited By ~ 5

Author(s):

Nak-Jin Seong ◽

Eun-Suck Choi ◽

Soon-Gil Yoon

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Bottom Electrode ◽

Chemical Vapor ◽

Thin Film Deposition ◽

Film Deposition ◽

Metalorganic Chemical

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Preparation and Characterization of RuOxThin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.2667 ◽

2004 ◽

Vol 43 (5A) ◽

pp. 2667-2671 ◽

Cited By ~ 1

Author(s):

Kyoung-Won Kim ◽

Nam-Soo Kim ◽

Hyung-Gyoo Lee ◽

Yeong-Seuk Kim ◽

Hee-Jae Kang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical ◽

Liquid Delivery

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Plasma-Enhanced Metalorganic Chemical Vapor Deposition for High Temperature Superconducting Thin Film

Materials Science Forum ◽

10.4028/www.scientific.net/msf.140-142.457 ◽

1993 ◽

Vol 140-142 ◽

pp. 457-464

Author(s):

Kenji Ebihara ◽

Tomoaki Ikegami

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Film ◽

High Temperature Superconducting ◽

Metalorganic Chemical

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CHARACTERISATION OF FERROELECTRIC PbZrXTi1-XO3 (PZT) THIN FILMS PREPARED BY LIQUID-DELIVERY METALORGANIC CHEMICAL VAPOR DEPOSITION

Integrated Ferroelectrics ◽

10.1080/10584580600663748 ◽

2006 ◽

Vol 81 (1) ◽

pp. 289-295 ◽

Cited By ~ 1

Author(s):

S. MATICHYN ◽

M. LISKER ◽

M. SILINSKAS ◽

B. GARKE ◽

E. BURTE

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Pzt Thin Films ◽

Metalorganic Chemical ◽

Liquid Delivery

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The deposition behavior of SiO[sub 2]–TiO[sub 2] thin film by metalorganic chemical vapor deposition method

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1287154 ◽

2000 ◽

Vol 18 (5) ◽

pp. 2384 ◽

Cited By ~ 16

Author(s):

Si-Moo Lee ◽

Jeong-Hoon Park ◽

Kug-Sun Hong ◽

Woon-Jo Cho ◽

Dong-Lae Kim

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Deposition Behavior ◽

Metalorganic Chemical

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Electrical Properties of SrBi2Ta2O9 (SBT) Thin Film Prepared by Metalorganic Chemical Vapor Deposition

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.181-182.93 ◽

2000 ◽

Vol 181-182 ◽

pp. 93-100

Author(s):

N. Nukaga ◽

Hiroshi Funakubo ◽

Ishikawa Kunio ◽

E. Shigeno ◽

Yutaka Sawada

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

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Improvement in ferroelectric properties of SrBi2Ta2O9 thin films with Bi2O3 buffer layers by liquid-delivery metalorganic chemical-vapor deposition

Applied Physics Letters ◽

10.1063/1.1400077 ◽

2001 ◽

Vol 79 (10) ◽

pp. 1519-1521 ◽

Cited By ~ 27

Author(s):

Woong-Chul Shin ◽

Soon-Gil Yoon

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Ferroelectric Properties ◽

Chemical Vapor ◽

Buffer Layers ◽

Metalorganic Chemical ◽

Liquid Delivery

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ZnS:Mn thin-film electroluminescent devices prepared by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(96)00321-1 ◽

1996 ◽

Vol 169 (1) ◽

pp. 33-39 ◽

Cited By ~ 20

Author(s):

Hideki Kina ◽

Yoji Yamada ◽

Yukihiro Maruta ◽

Yukihisa Tamura

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Electroluminescent Devices ◽

Metalorganic Chemical

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Phase transition of PbTiO3 polycrystalline thin film prepared by metalorganic chemical vapor deposition on yttrium stabilized zirconium

Solid State Communications ◽

10.1016/0038-1098(95)00465-3 ◽

1995 ◽

Vol 96 (7) ◽

pp. 477-480 ◽

Cited By ~ 4

Author(s):

Tao Yu ◽

Yan-Feng Chen ◽

Li Shun ◽

Jian-Xie Chen ◽

Nai-Ben Ming

Keyword(s):

Thin Film ◽

Phase Transition ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Polycrystalline Thin Film ◽

Metalorganic Chemical

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Metalorganic Chemical Vapor Deposition of Copper Using (Hexafluoroacetylacetonate)Cu(I)(3,3-dimethyl-1-butene) with a Liquid Delivery System

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.2962 ◽

2002 ◽

Vol 41 (Part 1, No. 5A) ◽

pp. 2962-2968 ◽

Cited By ~ 10

Author(s):

Kyeong-Keun Choi ◽

Sung G. Pyo ◽

Dok Won Lee ◽

Shi-Woo Rhee

Keyword(s):

Chemical Vapor Deposition ◽

Delivery System ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical ◽

Liquid Delivery

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