Role of oxygen on the electrical activation of B in Ge by excimer laser annealing

2013 ◽  
Vol 211 (1) ◽  
pp. 122-125 ◽  
Author(s):  
G. Impellizzeri ◽  
E. Napolitani ◽  
R. Milazzo ◽  
S. Boninelli ◽  
M. Cuscunà ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Electrical Activation ◽  
Excimer Laser Annealing

Grain Enlargement of Polycrystalline Silicon by Multipulse Excimer Laser Annealing: Role of Hydrogen

2006 ◽  
Vol 45 (4A) ◽  
pp. 2726-2730 ◽  
Author(s):  
Naoya Kawamoto ◽  
Atsushi Masuda ◽  
Naoto Matsuo ◽  
Yasuhiro Seri ◽  
Toshimasa Nishimori ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Excimer Laser Annealing

Electrical Activation of Boron in Si Film Using Excimer Laser Annealing

2009 ◽  
Vol 54 (9(5)) ◽  
pp. 463-466 ◽  
Author(s):  
Takashi Noguchi ◽  
Kenji Kawai ◽  
Tomoyuki Miyahira ◽  
Toshiharu Suzuki ◽  
Masateru Sato
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Electrical Activation ◽  
Excimer Laser Annealing

Role of light scattering in excimer laser annealing of Si

2005 ◽  
Vol 86 (16) ◽  
pp. 161905 ◽  
Author(s):  
Antonino La Magna ◽  
Paola Alippi ◽  
Vittorio Privitera ◽  
Guglielmo Fortunato
Keyword(s):  
Light Scattering ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Role Of Light

Role of hydrogen in excimer laser annealing of hydrogen-modulation doped a-Si film

2008 ◽  
Vol 52 (3) ◽  
pp. 381-387 ◽  
Author(s):  
Akira Heya ◽  
Naoto Matsuo ◽  
Tadashi Serikawa ◽  
Naoya Kawamoto
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing
Sign in / Sign up

Export Citation Format

Share Document