Simultaneous measurements of temporally and spatially resolved ion and electron temperatures using a semiconductor detector array in a single plasma discharge

2003 ◽  
Vol 74 (3) ◽  
pp. 2144-2147 ◽  
Author(s):  
T. Numakura ◽  
T. Cho ◽  
R. Minami ◽  
J. Kohagura ◽  
M. Hirata ◽  
...  
Keyword(s):  
Semiconductor Detector ◽  
Plasma Discharge ◽  
Detector Array ◽  
Spatially Resolved ◽  
Simultaneous Measurements ◽  
Single Plasma

Analyses of Temporally and Spatially Resolved Plasma Behavior Using X-Ray Data in a Single Plasma Discharge on Gamma 10

2003 ◽  
Vol 43 (1T) ◽  
pp. 280-282
Author(s):  
R. Minami ◽  
T. Cho ◽  
T. Numakura ◽  
J. Kohagura ◽  
M. Hirata ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
X Ray ◽  
Spatially Resolved ◽  
Single Plasma ◽  
Plasma Behavior

Simultaneous Measurements of Spatial Profiles of Ion and Electron Temperatures Using a Semiconductor Detector Array

2001 ◽  
Vol 39 (1T) ◽  
pp. 277-280
Author(s):  
T. Numakura ◽  
T. Cho ◽  
J. Kohagura ◽  
M. Hirata ◽  
R. Minami ◽  
...  
Keyword(s):  
Semiconductor Detector ◽  
Detector Array ◽  
Simultaneous Measurements

Simultaneous Spatially Resolved Multispectral Optical Emission Of Sputter Processes

1995 ◽  
Vol 406 ◽  
Author(s):  
J. D. Klein ◽  
S. L. Clauso
Keyword(s):  
Magnetron Sputtering ◽  
Optical Spectroscopy ◽  
Optical Emission ◽  
Gas Composition ◽  
Spatially Resolved ◽  
Product Film ◽  
Spectroscopy System ◽  
Chamber Gas ◽  
Single Plasma

AbstractAn optical spectroscopy system was configured to monitor several plasma positions at the same time. The system allows monitoring of several points within a single plasma. Magnetron sputtering of YBa2Cu3O7 (YBCO) in a reduction-oxidation (redox) environment provided a process in which both cation and gas species are vital in determining the quality of the product film. Spatial sampling of the sputter plasma defined a disparity in the manner in which Ba and Cu emissions respond to changes in chamber gas composition. Oxygen emissions were found to respond quickly to inlet gas composition while Cu emissions were notably sluggish.

Spatially Resolved Temperature Measurements in a Liquid Using Laser Induced Phosphorescence

2001 ◽  
Vol 123 (2) ◽  
pp. 293-302 ◽  
Author(s):  
S. L. Thomson ◽  
D. Maynes
Keyword(s):  
Recent Progress ◽  
Fluid Velocity ◽  
Temperature Data ◽  
Temperature Measurements ◽  
Experimental Methodology ◽  
Molecular Tagging Velocimetry ◽  
Molecular Tagging ◽  
Spatially Resolved ◽  
Simultaneous Measurements ◽  
Measurement Methodology

This paper describes recent advances in the development of a temperature measurement methodology based on phosphorescence of a tracer molecule in a liquid. The methodology represents an extension of molecular tagging velocimetry (MTV). MTV is a laser-based technique of obtaining spatially resolved fluid velocity profiles. The methodology has the potential of providing spatially resolved simultaneous measurements of velocity and temperature data over a planar domain. Presently, a method of obtaining temperatures over a range of 30°C with a typical uncertainty of ±1.0–1.5°C has been developed. Recent progress has resulted in a method of generating robust calibration curves for use in subsequent temperature measurements. A discussion of the experimental methodology, calibration curve development, and error analysis is presented. Finally, simultaneous temperature and velocity profile measurements using the method are demonstrated under dynamic conditions.

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