Spectroscopic characterization of stress-induced leakage current in sub 5-nm-thick silicon oxide film

2002 ◽  
Vol 92 (5) ◽  
pp. 2593-2601 ◽  
Author(s):  
Kenji Komiya ◽  
Yasuhisa Omura
Keyword(s):  
Oxide Film ◽  
Leakage Current ◽  
Silicon Oxide ◽  
Spectroscopic Characterization ◽  
Silicon Oxide Film ◽  
Stress Induced Leakage Current

Characterization of methyl-doped silicon oxide film for inter-layer dielectrics application

2001 ◽  
Author(s):  
Hao Cui ◽  
Hongqiang Lu ◽  
I. Bhat ◽  
S. Murarka ◽  
W. Lanford ◽  
...  
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Doped Silicon

Electrochemical Characterization of Surface Oxide Films Formed on Silicon Electrodes in 3% Sodium Chloride

2017 ◽  
Vol 68 (2) ◽  
pp. 232-237
Author(s):  
Malha Nazef Allaoua ◽  
Moussa Bounoughaz ◽  
Rachid Lamari
Keyword(s):  
Electronic Structure ◽  
Sodium Chloride ◽  
Oxide Film ◽  
Manufacturing Process ◽  
Silicon Oxide ◽  
Structure Model ◽  
Silicon Oxide Film ◽  
Spectral Techniques ◽  
The Stability

The study focused on the effect of cooling rate on the behaviour of oxide layers formed on silicon (Si) electrodes in 3% Sodium Chloride. All analysis conducted by electrochemical and spectral techniques confirmed that the stability of the silicon oxide film is influenced by the cooling kinetic used in the manufacturing process of Si material. The electronic structure model studied by Mott-Schottky measurements describes the passive film as a hetero-junction (p-n) composed of a metal/Si oxides interface and Si hydroxides/electrolyte interface.

Adhesion of a thin silicon oxide film on a polycarbonate substrate

1993 ◽  
Vol 64-65 ◽  
pp. 849-856 ◽  
Author(s):  
S. Vallon ◽  
B. Drévillon ◽  
C. Sénémaud ◽  
A. Gheorghiu ◽  
V. Yakovlev
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Thin Silicon ◽  
Polycarbonate Substrate

Photoluminescence of a silicon oxide film formed by anodization in the electropolishing region in HF solution

1995 ◽  
Vol 7 (14) ◽  
pp. 2901-2907 ◽  
Author(s):  
Xiangyang Ma ◽  
Lideng Chen ◽  
Zhenguo Ji ◽  
Hongnian Yao ◽  
Duanlin Que
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film
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