Three-dimensional imaging of a silicon flip chip using the two-photon optical-beam induced current effect

2002 ◽  
Vol 81 (1) ◽  
pp. 7-9 ◽  
Author(s):  
E. Ramsay ◽  
D. T. Reid ◽  
K. Wilsher
Keyword(s):  
Flip Chip ◽  
Three Dimensional ◽  
Optical Beam ◽  
Induced Current ◽  
Current Effect ◽  
Three Dimensional Imaging ◽  
Two Photon ◽  
Optical Beam Induced Current

Three-Dimensional Nanometric Sub-Surface Imaging of a Silicon Flip-Chip Using the Two-Photon Optical Beam Induced Current Method

2007 ◽  
Author(s):  
E. Ramsay ◽  
K. A. Serrels ◽  
M. J. Thomson ◽  
A. J. Waddie ◽  
R. J. Warburton ◽  
...  
Keyword(s):  
Flip Chip ◽  
Three Dimensional ◽  
Current Method ◽  
Optical Beam ◽  
Lateral Resolution ◽  
Surface Imaging ◽  
Induced Current ◽  
Axial Resolution ◽  
Two Photon ◽  
Optical Beam Induced Current

Abstract By implementing two-photon optical-beam-induced current microscopy using a solid-immersion lens, imaging inside a silicon flip chip is reported with 166nm lateral resolution and an axial resolution capable of resolving features only 100nm in height.

Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

2007 ◽  
Vol 47 (9-11) ◽  
pp. 1534-1538 ◽  
Author(s):  
E. Ramsay ◽  
K.A. Serrels ◽  
M.J. Thomson ◽  
A.J. Waddie ◽  
R.J. Warburton ◽  
...  
Keyword(s):  
Flip Chip ◽  
Three Dimensional ◽  
Current Method ◽  
Optical Beam ◽  
Surface Imaging ◽  
Induced Current ◽  
Two Photon ◽  
Optical Beam Induced Current

Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

2005 ◽  
Vol 30 (1) ◽  
pp. 26 ◽  
Author(s):  
E. Ramsay ◽  
N. Pleynet ◽  
D. Xiao ◽  
R. J. Warburton ◽  
D. T. Reid
Keyword(s):  
Flip Chip ◽  
Optical Beam ◽  
Induced Current ◽  
Two Photon ◽  
Optical Beam Induced Current
Sign in / Sign up

Export Citation Format

Share Document