Comparison of one- and two-photon optical beam-induced current imaging

1999 ◽  
Vol 86 (4) ◽  
pp. 2226-2231 ◽  
Author(s):  
Chris Xu ◽  
Winfried Denk
1999 ◽  
Vol 24 (20) ◽  
pp. 1407 ◽  
Author(s):  
Fu-Jen Kao ◽  
Mao-Kuo Huang ◽  
Yung-Shun Wang ◽  
Sheng-Lung Huang ◽  
Ming-Kwei Lee ◽  
...  

Author(s):  
E. Ramsay ◽  
K. A. Serrels ◽  
M. J. Thomson ◽  
A. J. Waddie ◽  
R. J. Warburton ◽  
...  

Abstract By implementing two-photon optical-beam-induced current microscopy using a solid-immersion lens, imaging inside a silicon flip chip is reported with 166nm lateral resolution and an axial resolution capable of resolving features only 100nm in height.


2007 ◽  
Vol 47 (9-11) ◽  
pp. 1534-1538 ◽  
Author(s):  
E. Ramsay ◽  
K.A. Serrels ◽  
M.J. Thomson ◽  
A.J. Waddie ◽  
R.J. Warburton ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document