Damage evolution and recovery on both Si and C sublattices in Al-implanted 4H–SiC studied by Rutherford backscattering spectroscopy and nuclear reaction analysis
1993 ◽
Vol 11
(5)
◽
pp. 2808-2815
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1995 ◽
Vol 120
(3-4)
◽
pp. 358-371
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2006 ◽
Vol 249
(1-2)
◽
pp. 132-135
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Keyword(s):
1990 ◽
pp. 531-533
Keyword(s):