Measurements and modeling of ion energy distributions in high-density, radio-frequency biased CF[sub 4] discharges

Mark A. Sobolewski; Yicheng Wang; Amanda Goyette

doi:10.1063/1.1467403

Measurements and modeling of ion energy distributions in high-density, radio-frequency biased CF[sub 4] discharges

Journal of Applied Physics ◽

10.1063/1.1467403 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6303 ◽

Cited By ~ 43

Author(s):

Mark A. Sobolewski ◽

Yicheng Wang ◽

Amanda Goyette

Keyword(s):

Radio Frequency ◽

High Density ◽

Energy Distributions ◽

Ion Energy ◽

Ion Energy Distributions

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Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor

Journal of Applied Physics ◽

10.1063/1.370298 ◽

1999 ◽

Vol 85 (8) ◽

pp. 3966-3975 ◽

Cited By ~ 74

Author(s):

Mark A. Sobolewski ◽

James K. Olthoff ◽

Yicheng Wang

Keyword(s):

Radio Frequency ◽

Plasma Reactor ◽

High Density ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions ◽

Density Plasma

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Measurements and models of ion energy distributions in high-density, radio-frequency-biased CF/sub 4/ discharges

IEEE Conference Record - Abstracts 2002 IEEE International Conference on Plasma Science (Cat No 02CH37340) PLASMA-02 ◽

10.1109/plasma.2002.1030570 ◽

2003 ◽

Author(s):

M.A. Sobolewski ◽

Y. Wang ◽

A. Goyette

Keyword(s):

Radio Frequency ◽

High Density ◽

Energy Distributions ◽

Ion Energy ◽

Ion Energy Distributions

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Effect of electrode material on measured ion energy distributions in radio‐frequency discharges

Applied Physics Letters ◽

10.1063/1.114540 ◽

1995 ◽

Vol 67 (4) ◽

pp. 473-475 ◽

Cited By ~ 18

Author(s):

J. K. Olthoff ◽

R. J. Van Brunt ◽

S. B. Radovanov

Keyword(s):

Radio Frequency ◽

Electrode Material ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas

Journal of Applied Physics ◽

10.1063/1.1311827 ◽

2000 ◽

Vol 88 (8) ◽

pp. 4510 ◽

Cited By ~ 2

Author(s):

Martin Misakian ◽

Eric Benck ◽

Yicheng Wang

Keyword(s):

Radio Frequency ◽

Time Evolution ◽

Optical Emission ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions

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Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

Journal of Applied Physics ◽

10.1063/1.370138 ◽

1999 ◽

Vol 85 (9) ◽

pp. 6358-6365 ◽

Cited By ~ 54

Author(s):

Yicheng Wang ◽

J. K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Journal of Applied Physics ◽

10.1063/1.372148 ◽

2000 ◽

Vol 87 (5) ◽

pp. 2114-2121 ◽

Cited By ~ 27

Author(s):

Yicheng Wang ◽

Eric C. Benck ◽

Martin Misakian ◽

Manabu Edamura ◽

James K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Time Resolved ◽

Ion Energy ◽

Optical Emissions ◽

Radio Frequency Discharges ◽

Ion Energy Distributions ◽

Time Resolved Measurements

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Ion energy distributions in radio frequency discharges sustained in gas mixtures obtained using a Monte Carlo-fluid hybrid model: endothermic processes and ion holes

Plasma Sources Science and Technology ◽

10.1088/0963-0252/3/2/010 ◽

1994 ◽

Vol 3 (2) ◽

pp. 190-205 ◽

Cited By ~ 6

Author(s):

H H Hwang ◽

M J Kushner

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Hybrid Model ◽

Gas Mixtures ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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Time evolution of ion energy distributions and optical emissions in pulsed radio frequency plasmas

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829441 ◽

2003 ◽

Author(s):

M. Misakian ◽

E. Benck ◽

Y. Wang ◽

J. Olthoff ◽

J. Roberts

Keyword(s):

Radio Frequency ◽

Time Evolution ◽

Energy Distributions ◽

Ion Energy ◽

Optical Emissions ◽

Ion Energy Distributions

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Ion energy distributions in dual‐ and single‐mode microwave/radio‐frequency plasma

Journal of Applied Physics ◽

10.1063/1.359772 ◽

1995 ◽

Vol 78 (8) ◽

pp. 4855-4858 ◽

Cited By ~ 13

Author(s):

P. Reinke ◽

S. Bureau ◽

J. E. Klemberg‐Sapieha ◽

L. Martinu

Keyword(s):

Radio Frequency ◽

Single Mode ◽

Radio Frequency Plasma ◽

Energy Distributions ◽

Ion Energy ◽

Frequency Plasma ◽

Microwave Radio ◽

Ion Energy Distributions

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Ion energy distributions in radio‐frequency discharges

Journal of Applied Physics ◽

10.1063/1.350247 ◽

1991 ◽

Vol 70 (1) ◽

pp. 82-92 ◽

Cited By ~ 53

Author(s):

D. Field ◽

D. F. Klemperer ◽

P. W. May ◽

Y. P. Song

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

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