Depth profiling of silicon–hydrogen bonding modes in amorphous and microcrystalline Si:H thin films by real-time infrared spectroscopy and spectroscopic ellipsometry

Hiroyuki Fujiwara; Michio Kondo; Akihisa Matsuda

doi:10.1063/1.1457535

Depth profiling of silicon–hydrogen bonding modes in amorphous and microcrystalline Si:H thin films by real-time infrared spectroscopy and spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.1457535 ◽

2002 ◽

Vol 91 (7) ◽

pp. 4181-4190 ◽

Cited By ~ 48

Author(s):

Hiroyuki Fujiwara ◽

Michio Kondo ◽

Akihisa Matsuda

Keyword(s):

Thin Films ◽

Hydrogen Bonding ◽

Infrared Spectroscopy ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Depth Profiling

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Hot-wire deposition of a-Si:H thin films on wafer substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy

Thin Solid Films ◽

10.1016/j.tsf.2007.06.092 ◽

2008 ◽

Vol 516 (5) ◽

pp. 511-516 ◽

Cited By ~ 7

Author(s):

P.J. van den Oever ◽

J.J.H. Gielis ◽

M.C.M. van de Sanden ◽

W.M.M. Kessels

Keyword(s):

Thin Films ◽

Infrared Spectroscopy ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Hot Wire

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Application of real time spectroscopic ellipsometry for high resolution depth profiling of compositionally graded amorphous silicon alloy thin films

Applied Physics Letters ◽

10.1063/1.118972 ◽

1997 ◽

Vol 70 (16) ◽

pp. 2150-2152 ◽

Cited By ~ 17

Author(s):

H. Fujiwara ◽

Joohyun Koh ◽

C. R. Wronski ◽

R. W. Collins

Keyword(s):

Thin Films ◽

High Resolution ◽

Amorphous Silicon ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Depth Profiling ◽

Silicon Alloy

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Real-time monitoring and process control in amorphous∕crystalline silicon heterojunction solar cells by spectroscopic ellipsometry and infrared spectroscopy

Applied Physics Letters ◽

10.1063/1.1850612 ◽

2005 ◽

Vol 86 (3) ◽

pp. 032112 ◽

Cited By ~ 71

Author(s):

Hiroyuki Fujiwara ◽

Michio Kondo

Keyword(s):

Solar Cells ◽

Infrared Spectroscopy ◽

Process Control ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Crystalline Silicon ◽

Real Time Monitoring ◽

Heterojunction Solar Cells ◽

Silicon Heterojunction Solar Cells

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Quantification of microstructural evolution in sputtered a‐Si thin films by real time spectroscopic ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577378 ◽

1991 ◽

Vol 9 (3) ◽

pp. 632-637 ◽

Cited By ~ 6

Author(s):

Ilsin An ◽

H. V. Nguyen ◽

N. V. Nguyen ◽

R. W. Collins

Keyword(s):

Thin Films ◽

Real Time ◽

Microstructural Evolution ◽

Spectroscopic Ellipsometry

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Structural study of initial layer for μc-Si:H growth using real time in situ spectroscopic ellipsometry and infrared spectroscopy

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(99)00715-2 ◽

2000 ◽

Vol 266-269 ◽

pp. 38-42 ◽

Cited By ~ 29

Author(s):

H Fujiwara ◽

Y Toyoshima ◽

M Kondo ◽

A Matsuda

Keyword(s):

Infrared Spectroscopy ◽

Real Time ◽

Structural Study ◽

Spectroscopic Ellipsometry ◽

Initial Layer

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Real-Time Spectroscopic Ellipsometry of Silver Nanoparticle Formation in Poly(Vinyl Alcohol) Thin Films

The Journal of Physical Chemistry C ◽

10.1021/jp065081l ◽

2007 ◽

Vol 111 (1) ◽

pp. 182-187 ◽

Cited By ~ 30

Author(s):

T. W. H. Oates ◽

E. Christalle

Keyword(s):

Thin Films ◽

Real Time ◽

Silver Nanoparticle ◽

Spectroscopic Ellipsometry ◽

Vinyl Alcohol ◽

Poly Vinyl Alcohol ◽

Nanoparticle Formation

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Real-time study ofa−Si:H∕c−Siheterointerface formation and epitaxial Si growth by spectroscopic ellipsometry, infrared spectroscopy, and second-harmonic generation

Physical Review B ◽

10.1103/physrevb.77.205329 ◽

2008 ◽

Vol 77 (20) ◽

Cited By ~ 36

Author(s):

J. J. H. Gielis ◽

P. J. van den Oever ◽

B. Hoex ◽

M. C. M. van de Sanden ◽

W. M. M. Kessels

Keyword(s):

Infrared Spectroscopy ◽

Second Harmonic Generation ◽

Real Time ◽

Harmonic Generation ◽

Spectroscopic Ellipsometry ◽

Second Harmonic ◽

Time Study

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Critical investigation on hydrogen bonding by Fourier Transform Infrared spectroscopy in hydrogenated amorphous silicon thin films

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2013.04.062 ◽

2013 ◽

Vol 375 ◽

pp. 88-94 ◽

Cited By ~ 5

Author(s):

Habibuddin Shaik ◽

G. Mohan Rao

Keyword(s):

Thin Films ◽

Hydrogen Bonding ◽

Fourier Transform ◽

Infrared Spectroscopy ◽

Amorphous Silicon ◽

Fourier Transform Infrared Spectroscopy ◽

Hydrogenated Amorphous Silicon ◽

Silicon Thin Films ◽

Hydrogenated Amorphous ◽

Critical Investigation

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Interface-layer formation in microcrystalline Si:H growth on ZnO substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy

Journal of Applied Physics ◽

10.1063/1.1539920 ◽

2003 ◽

Vol 93 (5) ◽

pp. 2400-2409 ◽

Cited By ~ 41

Author(s):

Hiroyuki Fujiwara ◽

Michio Kondo ◽

Akihisa Matsuda

Keyword(s):

Infrared Spectroscopy ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Interface Layer ◽

Layer Formation

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Structural and Optical Properties of Two-Stage CuInSe2 Thin Films Studied by Real Time Spectroscopic Ellipsometry

2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc40753.2019.8980671 ◽

2019 ◽

Author(s):

Dhurba R. Sapkota ◽

Robert W. Collins ◽

Puja Pradhan ◽

Prakash Koirala ◽

Richard Irving ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Structural And Optical Properties ◽

Two Stage

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