Plasma diagnostics for investigating extreme ultraviolet light sources

2010 ◽  
Vol 108 (9) ◽  
pp. 093302 ◽  
Author(s):  
P. Yeates ◽  
J. White ◽  
E. T. Kennedy
Keyword(s):  
Ultraviolet Light ◽  
Plasma Diagnostics ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Extreme Ultraviolet Light

Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 µm-wavelength laser

2021 ◽  
Author(s):  
Yun Yuan ◽  
Yan-Yun Ma ◽  
Wenpeng Wang ◽  
Shijia Chen ◽  
Ye Cui ◽  
...  
Keyword(s):  
Energy Conversion ◽  
Emission Spectrum ◽  
Ultraviolet Light ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Band Emission ◽  
Percentage Points ◽  
Hydrodynamic Code ◽  
Extreme Ultraviolet Light

Abstract In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 µm and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of SP for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).

scholarly journals Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma

2015 ◽  
Author(s):  
Eiki Hotta ◽  
Yusuke Sakai ◽  
Yasushi Hayashi ◽  
Gohta Niimi ◽  
Bin Huang ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
X Ray ◽  
Extreme Ultraviolet Light

Dynamic Characteristics of Laser-Assisted Discharge Plasmas for Extreme Ultraviolet Light Sources

2010 ◽  
Vol 49 (9) ◽  
pp. 096202 ◽  
Author(s):  
Peng Lu ◽  
Sunao Katsuki ◽  
Nobufumi Tomimaru ◽  
Takahisa Ueno ◽  
Hidenori Akiyama
Keyword(s):  
Ultraviolet Light ◽  
Dynamic Characteristics ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Discharge Plasmas ◽  
Extreme Ultraviolet Light

Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

2010 ◽  
Vol 97 (23) ◽  
pp. 231501 ◽  
Author(s):  
Akira Sasaki ◽  
Katsunobu Nishihara ◽  
Atsushi Sunahara ◽  
Hiroyuki Furukawa ◽  
Takeshi Nishikawa ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Theoretical Investigation ◽  
Conversion Efficiency ◽  
Short Wavelength ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Extreme Ultraviolet Light

Laser produced plasma for efficient extreme ultraviolet light sources

2012 ◽  
Author(s):  
Tony Donnelly ◽  
Thomas Cummins ◽  
Colm O' Gorman ◽  
Bowen Li ◽  
Colm S. Harte ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

2012 ◽  
Author(s):  
Daniel Andruczyk ◽  
John Sporre ◽  
Dan Elg ◽  
Tae Cho ◽  
David N. Ruzic
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Energy Analyzer ◽  
Extreme Ultraviolet Light

scholarly journals Compact X-ray and Extreme-Ultraviolet Light Sources

2015 ◽  
Vol 26 (7) ◽  
pp. 40 ◽  
Author(s):  
Lahsen Assoufid ◽  
Uwe Arp ◽  
Patrick Naulleau ◽  
Sandra Biedron ◽  
William Graves
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
X Ray ◽  
Extreme Ultraviolet Light
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