O[sub 2] cluster ion assisted deposition for tin doped indium oxide (ITO) films

2001 ◽  
Author(s):  
Jiro Matsuo
Keyword(s):  
Shinku ◽  
2004 ◽  
Vol 47 (11) ◽  
pp. 796-801 ◽  
Author(s):  
Eriko NISHIMURA ◽  
Hideki OHKAWA ◽  
Yasushi SATO ◽  
Pung-Keun SONG ◽  
Yuzo SHIGESATO

1998 ◽  
Vol 54 (1-3) ◽  
pp. 258-261 ◽  
Author(s):  
Wei Qin ◽  
Ronald Philip Howson ◽  
Makoto Akizuki ◽  
Jiro Matsuo ◽  
Gikan Takaoka ◽  
...  

Author(s):  
Tianlei Ma ◽  
Mohamed Missous ◽  
Gergo Pinter ◽  
Xiang Li Zhong ◽  
Ben Spencer ◽  
...  

Investigation of novel and high-performance transparent conducting electrodes (TCEs) is required to substitute currently widely used tin-doped indium oxide (ITO) due to the low abundance of indium and constantly increasing...


2021 ◽  
Vol 13 (8) ◽  
pp. 1498-1505
Author(s):  
Long Wen ◽  
Bibhuti-B Sahu ◽  
Jeon-Geon Han ◽  
Geun-Young Yeom

The ultra-thin tin doped crystalline indium oxide (ITO) films (≤50 nm) were successfully deposited by a 3-dimensionally confined magnetron sputtering source (L-3DMS) at the temperature lower than 100 °C. The resistivity and the mobility of the ultra-thin ITO films deposited at a low processing temperature were about ~5 × 10−4 Ω · cm and >30 cm2/Vs, respectively, for the thickness of 30 nm. The high quality of the ultra-thin ITO films deposited by L-3DMS is believed to be related to the improved crystallinity with oxygen vacancies of the ITO films by high density plasma and low discharge voltage of the L-3DMS which enables the formation of a crystalline structure a low processing temperature.


Crystals ◽  
2019 ◽  
Vol 9 (6) ◽  
pp. 310 ◽  
Author(s):  
Shang-Chou Chang ◽  
Huang-Tian Chan

Low emissivity glass (low-e glass), which is often used in energy-saving buildings, has high thermal resistance and visible light transmission. Heavily doped wide band gap semiconductors like aluminum-doped zinc oxide (AZO) and tin-doped indium oxide (ITO) have these properties, especially after certain treatment. In our experiments, in-line sputtered AZO and ITO bilayer (AZO/ITO) films on glass substrates were prepared first. The deposition of AZO/ITO films was following by annealing in hydrogen/nitrogen (H2/N2) plasma with different N2 flows. The structure and optical and electrical properties of AZO/ITO films were surveyed. Experiment results indicated that N2 flow in H2/N2 plasma annealing of AZO/ITO films slightly modified the structure and electrical properties of AZO/ITO films. The X-ray diffraction peak corresponding to zinc oxide (002) crystal plane slightly shifted to a higher angle and its full width at half maximum decreased as the N2 flow increased. The electrical resistivity and the emissivity reduced for the plasma annealed AZO/ITO films when the N2 flow was raised. The optimum H2/N2 gas flow was 100/100 for plasma annealed AZO/ITO films in this work for low emissivity application. The emissivity and average visible transmittance for H2/N2 = 100/100 plasma annealed AZO/ITO were 0.07 and 80%, respectively, lying in the range of commercially used low emissivity glass.


1992 ◽  
Vol 271 ◽  
Author(s):  
Yasutaia Taiahashi ◽  
Hideo Hayashi ◽  
Yutaka Ohya

ABSTRACTIt is found that ethanolamine method, recently developed by us, is very useful to form stable, concentrated (0.4–0.5M) indium oxide-based sols from which very uniform, transparent In2O3 and ITO films are obtained by dip-coating. Indium isopropoxide and acetate can be used as the starting materials. The optical and electrical properties of these films were examined. A transparent ITO film with the highest conductivity (3030 S/cm, after annealing at 0.05 torr-600°C for 60 min) was obtained from the acetate at 600°C. The films from the alkoxide had lower conductivities probably due to the impurities included in the alkoxide.


2006 ◽  
Vol 26 (2-3) ◽  
pp. 500-504 ◽  
Author(s):  
Hédia Mbarek ◽  
Moncef Saadoun ◽  
Brahim Bessaïs

2006 ◽  
Vol 13 (02n03) ◽  
pp. 221-225 ◽  
Author(s):  
K. NARASIMHA RAO ◽  
SANJAY KASHYAP

Transparent and conducting oxide films find many applications because of their excellent properties such as high optical transparency, low surface resistance, high infrared reflectance, etc. Realization of these properties depend upon the choice of the deposition technique and the control of deposition parameters. In this paper, we report the preparation of highly transparent and conducting films of indium oxide ( In 2 O 3) and indium tin oxide (ITO) by activated reactive evaporation on glass substrates. These films were deposited by evaporating pure indium and 90% In + 10% Sn alloy using an electron gun in the presence of oxygen ions at ambient temperature. Films of different thickness have been prepared and their optical, electrical and structural properties are studied. In 2 O 3 films showed higher transparency (90%) compared to ITO films (85%) but the electrical resistivity was observed to be little higher (2.5 × 10-3 Ω cm) compared to ITO films (6 × 10-4 Ωcm). Hall measurements on aged ITO films gave the charge density of 3 × 1020 per cm3 and mobility 35.6 cm2/V-s. The refractive index and extinction coefficient were found to be around 2.0 and 0.005 for ITO films and 2.10 and 0.001 for In 2 O 3 films at 550 nm respectively. ITO and In 2 O 3 films were amorphous in nature for lesser thickness, but for thicker films, the partial crystallinity was observed.


2021 ◽  
Author(s):  
Ramanathan Govindarajan ◽  
Murali K.R

Abstract At present various oxide of metal semiconductors play significant role in the field of electronics device. Most of the semiconductor devices exploit the special characteristics of the junction between a p-type and n-type semiconductor, these devices can be made extremely small in size and they are incredibly fast in their response. Generally metal have good reflectivity in the electromagnetic region of infrared and visible radiation. Indium oxide material doped with tin (ITO) are recently used in the substrate material for various applications, because of it has special properties are low resistivity and high optical transmittance in the visible region. In this paper, we prepare ITO films with different tin concentration (5%, 10%, 30%, 50% and 70%) using acrylamide sol gel dip coated method and its results were reported. TCO materials have good electrical conductivity and optical transparency, and also it has n-type semiconductor with a band gap between 3.5 and 4.3 eV. An X-ray study indicates all the prepared samples were bixbyte structure. Optical behaviour of materials can be understood in the near infrared and visible spectrum. Some optical parameters refractive index, extinction coefficient and dielectric constant of ITO films are calculated from the data received from the UV transmission studies. Using W-D model the dispersion of refractive index was calculated. The optical band gap, oscillator energy, dispersion energy and optical conductivity and N/m* ratio were estimated and this material is well suitable for dye sensitized solar cell and sensor application.


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