Low energy ion beams for surface modification and film deposition

2001 ◽  
Author(s):  
J. Wayne Rabalais
Keyword(s):  
Surface Modification ◽  
Ion Beams ◽  
Film Deposition ◽  
Low Energy

Film deposition and surface modification using intense pulsed ion beams

1995 ◽  
Vol 13 (3) ◽  
pp. 1182-1187 ◽  
Author(s):  
C. A. Meli ◽  
K. S. Grabowski ◽  
D. D. Hinshelwood ◽  
S. J. Stephanakis ◽  
D. J. Rej ◽  
...  
Keyword(s):  
Surface Modification ◽  
Ion Beams ◽  
Film Deposition

In Situ Parametric Investigation of the Mechanism of Diamond Film Deposition from Low Energy Ion Beams

1988 ◽  
Vol 128 ◽  
Author(s):  
Y. Lifshitz ◽  
S. R. Kasi ◽  
J. W. Rabalais
Keyword(s):  
Diamond Film ◽  
Carbon Deposition ◽  
Ion Beam ◽  
General Scheme ◽  
Ion Beams ◽  
Film Deposition ◽  
Low Energy ◽  
Trapping Efficiency ◽  
Local Concentration

ABSTRACTA general scheme for the analysis of deposition from hyperthermal (10–5000 eV) species is presented. Successful deposition involves consideration of species range, maximum local concentration obtainable, trapping efficiency, radiation damage, and sputtering efficiency. Examples of in situ parametric investigations of carbon deposition performed with a controlled mass selected UHV ion beam facility are presented. A subplantation model for diamond film deposition is discussed. XRD evidence for epitaxial growth of diamond(111) on Si(111) is provided.

Sign in / Sign up

Export Citation Format

Share Document