Thin film deposition using low‐energy ion beams. I. System specification and design

J. Amano; P. Bryce; R. P. W. Lawson

doi:10.1116/1.569040

Thin film deposition using low‐energy ion beams. I. System specification and design

Journal of Vacuum Science and Technology ◽

10.1116/1.569040 ◽

1976 ◽

Vol 13 (2) ◽

pp. 591-595 ◽

Cited By ~ 49

Author(s):

J. Amano ◽

P. Bryce ◽

R. P. W. Lawson

Keyword(s):

Thin Film ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

System Specification

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Thin‐film deposition using low‐energy ion beams (3) Mg+ ion‐beam deposition and analysis of deposits

Journal of Vacuum Science and Technology ◽

10.1116/1.569185 ◽

1977 ◽

Vol 14 (2) ◽

pp. 695-698 ◽

Cited By ~ 15

Author(s):

J. Amano ◽

R. P. W. Lawson

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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Thin‐film deposition using low‐energy ion beams (3) Mg+ ion‐beam deposition and analysis of deposits

Journal of Vacuum Science and Technology ◽

10.1116/1.569281 ◽

1977 ◽

Vol 14 (3) ◽

pp. 836-839 ◽

Cited By ~ 10

Author(s):

J. Amano ◽

R. P. W. Lawson

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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3124. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

Vacuum ◽

10.1016/s0042-207x(77)80590-3 ◽

1977 ◽

Vol 27 (12) ◽

pp. 665 ◽

Cited By ~ 1

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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Thin‐film deposition using low‐energy ion beams (2) Pb+ ion‐beam deposition and analysis of deposits

Journal of Vacuum Science and Technology ◽

10.1116/1.569184 ◽

1977 ◽

Vol 14 (2) ◽

pp. 690-694 ◽

Cited By ~ 10

Author(s):

J. Amano ◽

R. P. W. Lawson

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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3123. Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

Vacuum ◽

10.1016/s0042-207x(77)80589-7 ◽

1977 ◽

Vol 27 (12) ◽

pp. 665

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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3108. Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

Vacuum ◽

10.1016/s0042-207x(77)80574-5 ◽

1977 ◽

Vol 27 (12) ◽

pp. 664

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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3109. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

Vacuum ◽

10.1016/s0042-207x(77)80575-7 ◽

1977 ◽

Vol 27 (12) ◽

pp. 664

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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Thin‐film deposition using low‐energy ion beams (4) Ion source modification

Journal of Vacuum Science and Technology ◽

10.1116/1.569418 ◽

1978 ◽

Vol 15 (1) ◽

pp. 118-119 ◽

Cited By ~ 17

Author(s):

J. Amano ◽

R. P. W. Lawson

Keyword(s):

Thin Film ◽

Thin Film Deposition ◽

Ion Beams ◽

Ion Source ◽

Film Deposition ◽

Low Energy

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Thin‐film deposition using low‐energy ion beams (2) Bb+ ion‐beam deposition and analysis of deposits

Journal of Vacuum Science and Technology ◽

10.1116/1.569280 ◽

1977 ◽

Vol 14 (3) ◽

pp. 831-835 ◽

Cited By ~ 18

Author(s):

J. Amano ◽

R. P. W. Lawson

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Ion Beams ◽

Film Deposition ◽

Low Energy ◽

Ion Beam Deposition ◽

Beam Deposition

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Zirconia thin film deposition on silicon by reactive gas flow sputtering: the influence of low energy particle bombardment

Materials Science and Engineering A ◽

10.1016/0921-5093(91)90474-2 ◽

1991 ◽

Vol 140 ◽

pp. 528-533 ◽

Cited By ~ 19

Author(s):

T. Jung ◽

A. Westphal

Keyword(s):

Thin Film ◽

Particle Bombardment ◽

Gas Flow ◽

Thin Film Deposition ◽

Film Deposition ◽

Low Energy ◽

Energy Particle ◽

Zirconia Thin Film ◽

Reactive Gas

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