Comparative study of pulsed laser ablated plasma plumes from single crystal graphite and amorphous carbon targets. Part I. Optical emission spectroscopy

2000 ◽  
Vol 88 (11) ◽  
pp. 6861-6867 ◽  
Author(s):  
Y. Yamagata ◽  
A. Sharma ◽  
J. Narayan ◽  
R. M. Mayo ◽  
J. W. Newman ◽  
...  
Keyword(s):  
Comparative Study ◽  
Single Crystal ◽  
Amorphous Carbon ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Pulsed Laser ◽  
Optical Emission ◽  
Plasma Plumes

Plasma Diagnostics During Pulsed Laser Deposition of Diamond-Like Carbon Using Single Crystal Graphite and Amorphous Carbon

1999 ◽  
Vol 593 ◽  
Author(s):  
Y Yamagata ◽  
A. Sharma ◽  
J. Narayan ◽  
R. M. Mayo ◽  
J. W. Newman ◽  
...  
Keyword(s):  
Single Crystal ◽  
Pulsed Laser Deposition ◽  
Amorphous Carbon ◽  
Emission Intensity ◽  
Laser Energy ◽  
Pulsed Laser ◽  
Optical Emission ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Plasma Plumes

ABSTRACTOptical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.

Optical emission spectroscopy in pulsed laser deposition of silicon

Vacuum ◽  
2013 ◽  
Vol 90 ◽  
pp. 151-154 ◽  
Author(s):  
Chen Hon Nee ◽  
Seong Shan Yap ◽  
Wee Ong Siew ◽  
Turid Worren Reenaas ◽  
Teck Yong Tou
Keyword(s):  
Pulsed Laser Deposition ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Pulsed Laser ◽  
Optical Emission ◽  
Laser Deposition

Pulsed laser ablation-deposition of La0.5Sr0.5CoO3 for use as electrodes in nonvolatile ferroelectric memories

1996 ◽  
Vol 11 (6) ◽  
pp. 1514-1519 ◽  
Author(s):  
R. Dat ◽  
O. Auciello ◽  
D. J. Lichtenwalner ◽  
A. I. Kingon
Keyword(s):  
Laser Ablation ◽  
Emission Spectroscopy ◽  
Smooth Surface ◽  
Optical Emission Spectroscopy ◽  
Pulsed Laser ◽  
Optical Emission ◽  
Pulsed Laser Ablation ◽  
Deposition Parameters ◽  
Ferroelectric Memories ◽  
Oxygen Interaction

La0.5Sr0.5CoO3 (LSCO) thin films have been deposited on (100) MgO substrates using pulsed laser ablation-deposition (PLAD). The crystallographic orientation of LSCO was found to be dependent on the surface treatment of (100) MgO prior to deposition. PLAD deposition parameters were optimized to yield LSCO films with an RMS surface roughness of 40–50 Å. A smooth surface morphology was reproduced as long as the oxygen content of the LSCO target was preserved. Otherwise, “splashing” occurred which resulted in the transfer of condensed particles from molten spherical globules of LSCO from the target to the substrate. Splashing was subsequently eliminated and smooth surface quality was restored after annealing the LSCO target at 550 °C in oxygen for 3 h. Optical emission spectroscopy (OES) of the LSCO's plume identified excited atomic cobalt neutrals, excited singly ionized strontium and lanthanum, and excited molecular LaO species. Oxygen interaction with the plume produced no new species. Furthermore, the OES data suggest that the observed LaO molecules were not created by the chemical reaction between La and O2 during ablation, but were ejected directly from the target during the PLAD process.

Sign in / Sign up

Export Citation Format

Share Document