In situ monitoring of GaN metal-organic vapor phase epitaxy by spectroscopic ellipsometry

2000 ◽  
Vol 88 (7) ◽  
pp. 4085 ◽  
Author(s):  
S. Peters ◽  
T. Schmidtling ◽  
T. Trepk ◽  
U. W. Pohl ◽  
J.-T. Zettler ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Spectroscopic Ellipsometry ◽  
Vapor Phase Epitaxy ◽  
In Situ Monitoring ◽  
Organic Vapor ◽  
Metal Organic

AlN/GaN heterostructures grown by metal organic vapor phase epitaxy with in situ Si3N4 passivation

2011 ◽  
Vol 315 (1) ◽  
pp. 204-207 ◽  
Author(s):  
Kai Cheng ◽  
S. Degroote ◽  
M. Leys ◽  
F. Medjdoub ◽  
J. Derluyn ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Metal Organic

In situ verification of single-domain III-V on Si(100) growth via metal-organic vapor phase epitaxy

2008 ◽  
Vol 93 (17) ◽  
pp. 172110 ◽  
Author(s):  
Henning Döscher ◽  
Thomas Hannappel ◽  
Bernardette Kunert ◽  
Andreas Beyer ◽  
Kerstin Volz ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Single Domain ◽  
Organic Vapor ◽  
Metal Organic ◽  
Domain Iii

Spectroscopic ellipsometry study of GaAs1−xBix material grown on GaAs substrate by atmospheric pressure metal-organic vapor-phase epitaxy

2009 ◽  
Vol 95 (1) ◽  
pp. 011910 ◽  
Author(s):  
Nebiha Ben Sedrine ◽  
Imed Moussa ◽  
Hedi Fitouri ◽  
Ahmed Rebey ◽  
Belgacem El Jani ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Spectroscopic Ellipsometry ◽  
Atmospheric Pressure ◽  
Gaas Substrate ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Metal Organic

scholarly journals An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

2017 ◽  
Vol 88 (3) ◽  
pp. 035113 ◽  
Author(s):  
Guangxu Ju ◽  
Matthew J. Highland ◽  
Angel Yanguas-Gil ◽  
Carol Thompson ◽  
Jeffrey A. Eastman ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
X Ray ◽  
Organic Vapor ◽  
Metal Organic
Sign in / Sign up

Export Citation Format

Share Document