Thermal stability of Ta2O5 in metal–oxide–metal capacitor structures
2016 ◽
Vol 41
(5)
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pp. 912-918
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1983 ◽
Vol PAS-102
(2)
◽
pp. 282-289
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2006 ◽
Vol 160
(1)
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pp. 645-650
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Keyword(s):
Keyword(s):
2007 ◽
Vol 17
(7)
◽
pp. 1188-1198
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Keyword(s):