Work function thermal stability of RuO2-rich Ru–Si–O p-channel metal-oxide-semiconductor field-effect transistor gate electrodes
2010 ◽
Vol 13
(10)
◽
pp. H336
◽
1990 ◽
Vol 29
(Part 2, No. 12)
◽
pp. L2286-L2288
◽
Keyword(s):
2009 ◽
Vol 48
(4)
◽
pp. 04C013
◽
2021 ◽
Vol 134
◽
pp. 106046
Keyword(s):
2020 ◽
Vol 21
(3)
◽
pp. 339-347
◽
1997 ◽
Vol 9
(8)
◽
pp. 1143-1145
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