Improvement in gate oxide integrity on thin-film silicon-on-insulator substrates by lateral gettering

1997 ◽  
Vol 71 (23) ◽  
pp. 3397-3399 ◽  
Author(s):  
S. Q. Hong ◽  
T. Wetteroth ◽  
H. Shin ◽  
S. R. Wilson ◽  
D. Werho ◽  
...  
Keyword(s):  
Thin Film ◽  
Gate Oxide ◽  
Silicon On Insulator ◽  
Thin Film Silicon ◽  
Gate Oxide Integrity

ULSI-quality gate oxide on thin-film-silicon-on-insulator

2002 ◽  
Author(s):  
W.M. Huang ◽  
Z.J. Ma ◽  
M. Racanelli ◽  
D. Hughes ◽  
S. Ajuria ◽  
...  
Keyword(s):  
Thin Film ◽  
Gate Oxide ◽  
Silicon On Insulator ◽  
Thin Film Silicon

Leakage current models of thin film silicon-on-insulator devices

1998 ◽  
Vol 72 (10) ◽  
pp. 1199-1201 ◽  
Author(s):  
Hank Shin ◽  
Stella Hong ◽  
Tom Wetteroth ◽  
Syd R. Wilson ◽  
Dieter K. Schroder
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Silicon On Insulator ◽  
Thin Film Silicon

ChemInform Abstract: Novel Approach to Defect Etching in Thin Film Silicon-on-Insulator.

ChemInform ◽  
2010 ◽  
Vol 24 (42) ◽  
pp. no-no
Author(s):  
H. GASSEL ◽  
J. PETER-WEIDEMANN ◽  
H. VOGT
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Thin Film Silicon ◽  
Novel Approach

Excellence of Gate Oxide Integrity in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits Based onP-/P-Thin-Film Epitaxial Silicon Wafers

1997 ◽  
Vol 36 (Part 1, No. 5A) ◽  
pp. 2565-2570 ◽  
Author(s):  
Hirofumi Shimizu ◽  
Yuji Sugino ◽  
Norio Suzuki ◽  
Shogo Kiyota ◽  
Koichi Nagasawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Metal Oxide ◽  
Large Scale ◽  
Gate Oxide ◽  
Metal Oxide Semiconductor ◽  
Silicon Wafers ◽  
Oxide Semiconductor ◽  
Epitaxial Silicon ◽  
Gate Oxide Integrity
Sign in / Sign up

Export Citation Format

Share Document