The effect of impurity content on point defect evolution in ion implanted and electron irradiated Si

1997 ◽  
Vol 70 (22) ◽  
pp. 3002-3004 ◽  
Author(s):  
S. Libertino ◽  
J. L. Benton ◽  
D. C. Jacobson ◽  
D. J. Eaglesham ◽  
J. M. Poate ◽  
...  
Keyword(s):  
Point Defect ◽  
Impurity Content ◽  
Defect Evolution ◽  
Ion Implanted

Defect Evolution in Ion Implanted Si: from Point to Extended Defects

1997 ◽  
Vol 504 ◽  
Author(s):  
Sebania Libertino ◽  
Janet L. Benton ◽  
Salvatore Coffa ◽  
Dave J. Eaglesham
Keyword(s):  
Point Defect ◽  
Room Temperature ◽  
Deep Level ◽  
Extended Defects ◽  
Defect Structures ◽  
Annealing Behavior ◽  
Defect Complexes ◽  
Annealing Temperatures ◽  
Defect Evolution ◽  
Ion Implanted

ABSTRACTSeveral recent experiments assessing the role of impurities (C, O), dopants (P, B) and clustering on defect evolution in ion implanted Si are reviewed. Deep level transient spectroscopy measurements were used to analyze the defect structure in a wide range of ion implantation fluences (1×108–5×1013 cm−2) and annealing temperatures (100–800 °C). By using substrates with a different impurity content and comparing ion implanted and electron irradiated Si samples, many interesting features of defect evolution in Si have been elucidated. It is found that only a small percentage, 4–16 % depending on ion mass, of the Frenkel pairs generated by the beam escape direct recombination and is stored into an equal number of room temperature stable vacancy- (V-) and interstitial-type (I-) defect complexes. Identical defect structures and annealing behavior have been measured in ion implanted (1.2 MeV Si, 1×108–1×1010/cm2) and electron irradiated (9.2 MeV to fluences between 1 and 3×1015/cm2) samples in spite of the fact that denser collision cascades are produced by the ions. The O and C content of the substrate plays a major role in determining the point defect migration, the room temperature stable defect structures and their annealing behavior. Annealing at temperatures up to 300 °C produces a concomitant reduction of the I- and V-type defect complexes concentration, demonstrating that defect annihilation occurs preferentially in the bulk. At temperatures above 300 °C, when all V-type complexes have been annealed out, ion implanted samples present a residual I-type damage, storing 2–3 I per implanted ion. This unbalance is not observed in electron irradiated samples and it is a direct consequence of the extra implanted ion. The simple point defect structures produced at low ion fluence (1×108–1×1011 /cm2) anneal at ∼ 550 °C. At higher fluences (∼ 1012–1013/cm2) and for annealing temperatures above 500 °C the deep level spectrum is dominated by two signatures at Ev+0.33 eV and at Ev+0.52 eV that we have associated to Si interstitial clusters. Impurities (C, O and B) play a role in determining nucleation kinetics of these defects, but they are not their main constituents. The dissolution temperature of these clusters indicates that they might store the interstitials that drive transient enhanced diffusion phenomena occurring in the absence of extended defects. Finally, at higher implantation fluence, a signature of extended defects is observed and associated to the presence of {311} defects detected by transmission electron microscopy analyses.

Al+and N+implantation in silicon carbide: a role of point defect clusters in defect evolution

2001 ◽  
Author(s):  
Peter V. Rybin ◽  
Dmitri V. Kulikov ◽  
Yuri V. Trushin ◽  
J. Petzoldt
Keyword(s):  
Silicon Carbide ◽  
Point Defect ◽  
Defect Clusters ◽  
Defect Evolution ◽  
Point Defect Clusters

scholarly journals Lattice Damage in Ion-Implanted Compound Semiconductors and Its Effect on Electrical Activation

1993 ◽  
Vol 300 ◽  
Author(s):  
T. E. Haynes ◽  
R. Morton ◽  
S. S. Lau
Keyword(s):  
Point Defect ◽  
Compound Semiconductors ◽  
Electrical Activation ◽  
Electrical Performance ◽  
Ion Channeling ◽  
Independent Observations ◽  
Lattice Damage ◽  
Defect Interactions ◽  
Ion Species ◽  
Ion Implanted

ABSTRACTIn recent years, a number of experimental observations have indicated that interactions between mobile point defects generated during ion implantation play an important role in the damage production in Ill-V compound semiconductors, and particularly GaAs. This paper reviews a set of such observations based on ion channeling measurements of the lattice damage in GaAs implanted with Si ions. Selected independent observations are also surveyed to illustrate the importance of point-defect interactions. Taken together, these show that at least two contributions to the lattice damage must often be considered: a “prompt” contribution attributed to direct-impact amorphization, and a “delayed” contribution attributed to point-defect clustering. New measurements are then described which show the different effects that these two damage components have on the electrical activation in annealed, Siimplanted GaAs. The aim is to indicate the potential to exploit the balance between these two damage contributions in order to improve the electrical performance and reproducibility of ion-implanted and annealed layers. Finally, the applicability of these concepts to other ion species and other compound semiconductors (GaP and InP) is briefly discussed.

Anomalous Transient Diffusion of Ion Implanted Boron during Rapid Thermal Annealing

1989 ◽  
Vol 146 ◽  
Author(s):  
Y. M. Kim ◽  
G. Q. Lo ◽  
D. L. Kwong ◽  
H. H. Tseng ◽  
R. Hance
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Anomalous Diffusion ◽  
Low Dose ◽  
Silicon Wafers ◽  
Silicon Ions ◽  
Defect Evolution ◽  
Boron Implantation ◽  
Silicon Implantation ◽  
Ion Implanted

ABSTRACTEffects of defect evolution during rapid thermal annealing (RTA) on the anomalous diffusion of ion implanted boron have been studied by implanting silicon ions prior to boron implantation with doses ranging from 1 × 1014cm−2 to 1 × 1016cm−2 at energies ranging from 20 to 150 KeV into silicon wafers. Diffusion of boron atoms implanted into a Si preamorphized layer during RTA is found to be anomalous in nature, and the magnitude of boron displacement depends on the RTA temperature. While RTA of preamorphized samples at 1150°C shows an enhanced boron displacement compared to that in crystalline samples, a reduced displacement is observed in preamorphized samples annealed by RTA at 1000°C. In addition, low dose pre-silicon implantation enhances the anomalous displacement significantly, especially at high RTA temperatures (1 150°C). Finally, the anomalous diffusion is found to depend strongly on the defect evolution during RTA.

scholarly journals Intrinsic Point-Defect Balance in Self-Ion-Implanted ZnO

2013 ◽  
Vol 110 (1) ◽  
Author(s):  
Pekka T. Neuvonen ◽  
Lasse Vines ◽  
Bengt G. Svensson ◽  
Andrej Yu. Kuznetsov
Keyword(s):  
Point Defect ◽  
Intrinsic Point Defect ◽  
Ion Implanted
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