ZnSe nitrogen doping using an ion-free electron-cyclotron-resonance plasma beam

1997 ◽  
Vol 70 (11) ◽  
pp. 1453-1455 ◽  
Author(s):  
Hironori Tsukamoto ◽  
Masaharu Nagai ◽  
Eisaku Katoh ◽  
Kohshi Tamamura ◽  
Akira Ishibashi ◽  
...  
Keyword(s):  
Free Electron ◽  
Cyclotron Resonance ◽  
Nitrogen Doping ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Beam ◽  
Resonance Plasma

Degradation-free electron cyclotron resonance plasma etching of InP

1991 ◽  
Vol 6 (9) ◽  
pp. 929-933 ◽  
Author(s):  
S J Pearton ◽  
U K Chakrabarti ◽  
A P Perley ◽  
C Constantine ◽  
D Johnson
Keyword(s):  
Plasma Etching ◽  
Free Electron ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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