Heavy-ion sources: The Star, or the Cinderella, of the ion-implantation firmament? (invited)
2000 ◽
Vol 71
(2)
◽
pp. 603-611
◽
1998 ◽
Vol 69
(2)
◽
pp. 776-781
◽
Keyword(s):
2001 ◽
Vol 7
(2)
◽
pp. 124-134
Keyword(s):
2006 ◽
Vol 242
(1-2)
◽
pp. 186-189
◽
2016 ◽
Vol 87
(2)
◽
pp. 02C107
◽
Keyword(s):
1990 ◽
Vol 61
(1)
◽
pp. 553-555
◽
1990 ◽
Vol 125
(3)
◽
pp. 258-263
◽
1996 ◽
Vol 67
(3)
◽
pp. 962-964
◽
2010 ◽
Vol 43
(50)
◽
pp. 505302
◽