The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges
1994 ◽
Vol 65
(1)
◽
pp. 140-154
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1992 ◽
Vol 10
(6)
◽
pp. 3550-3562
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1995 ◽
Vol 100
(4)
◽
pp. 473
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Keyword(s):
1978 ◽
Vol 94
(1080)
◽
pp. 77-83
2020 ◽
2017 ◽