Radio frequency voltage division between two plasma sheaths in the Gaseous Electronics Conference reference cell
1994 ◽
Vol 65
(1)
◽
pp. 140-154
◽
1992 ◽
Vol 10
(6)
◽
pp. 3550-3562
◽
1995 ◽
Vol 100
(4)
◽
pp. 473
◽
Keyword(s):
1995 ◽
Vol 13
(3)
◽
pp. 954
◽
Keyword(s):
Keyword(s):