Radio‐frequency discharge source for beams of atomic nitrogen and oxygen

J. E. Pollard

doi:10.1063/1.1143811

Radio‐frequency discharge source for beams of atomic nitrogen and oxygen

Review of Scientific Instruments ◽

10.1063/1.1143811 ◽

1992 ◽

Vol 63 (2) ◽

pp. 1771-1776 ◽

Cited By ~ 35

Author(s):

J. E. Pollard

Keyword(s):

Radio Frequency ◽

Atomic Nitrogen ◽

Discharge Source ◽

Radio Frequency Discharge

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Application of a low-pressure radio frequency discharge source to polysilicon gate etching

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584859 ◽

1990 ◽

Vol 8 (1) ◽

pp. 1 ◽

Cited By ~ 34

Author(s):

J. M. Cook

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Discharge Source ◽

Polysilicon Gate ◽

Radio Frequency Discharge

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RADIO FREQUENCY DISCHARGE PLASMA AND HELICON SOURCE FOR DIFFERENT APPLICATIONS

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.2015015432 ◽

2014 ◽

Vol 18 (1-2) ◽

pp. 111-117

Author(s):

Victor V. Kuzenov ◽

Tatiana N. Polozova

Keyword(s):

Radio Frequency ◽

Discharge Plasma ◽

Helicon Source ◽

Radio Frequency Discharge

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Silane thermometry in radio‐frequency discharge plasma by coherent anti‐Stokes Raman spectroscopy

Journal of Applied Physics ◽

10.1063/1.336415 ◽

1986 ◽

Vol 59 (6) ◽

pp. 1872-1874 ◽

Cited By ~ 10

Author(s):

Nobuhiro Hata ◽

Akihisa Matsuda ◽

Kazunobu Tanaka

Keyword(s):

Raman Spectroscopy ◽

Radio Frequency ◽

Discharge Plasma ◽

Anti Stokes ◽

Radio Frequency Discharge

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Power dissipated in low‐pressure radio‐frequency discharge plasmas

Journal of Applied Physics ◽

10.1063/1.335395 ◽

1985 ◽

Vol 57 (1) ◽

pp. 53-58 ◽

Cited By ~ 103

Author(s):

O. A. Popov ◽

V. A. Godyak

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Discharge Plasmas ◽

Radio Frequency Discharge

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Experimental measurements in a radio-frequency discharge heated supersonic flow - Evaluation of a potential electric propulsion thruster

10.2514/6.1991-3615 ◽

1991 ◽

Author(s):

P. WANTUCK ◽

D. HULL

Keyword(s):

Supersonic Flow ◽

Radio Frequency ◽

Electric Propulsion ◽

Experimental Measurements ◽

Radio Frequency Discharge

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Effect of plasma‐surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.357722 ◽

1994 ◽

Vol 76 (3) ◽

pp. 1476-1479 ◽

Cited By ~ 13

Author(s):

B. N. Ganguly ◽

P. Bletzinger

Keyword(s):

Radio Frequency ◽

Surface Interactions ◽

Radial Variation ◽

Atom Density ◽

Plasma Surface ◽

Plasma Surface Interactions ◽

Radio Frequency Discharge

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Investigation of dielectric sample atomization and electrical characteristics in a radio frequency glow discharge source

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(95)00019-6 ◽

1995 ◽

Vol 50 (4-7) ◽

pp. 617-638 ◽

Cited By ~ 20

Author(s):

Mark Parker ◽

R. Kenneth Marcus

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Electrical Characteristics ◽

Radio Frequency Glow Discharge ◽

Discharge Source ◽

Dielectric Sample ◽

Glow Discharge Source

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Combined PIC–MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

Plasma Sources Science and Technology ◽

10.1088/0963-0252/13/2/018 ◽

2004 ◽

Vol 13 (2) ◽

pp. 315-320 ◽

Cited By ~ 22

Author(s):

I V Schweigert ◽

V A Schweigert

Keyword(s):

Radio Frequency ◽

Gas Pressure ◽

Fast Simulation ◽

Radio Frequency Discharge

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Probe measurements of the space potential in a radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.346389 ◽

1990 ◽

Vol 68 (7) ◽

pp. 3157-3162 ◽

Cited By ~ 61

Author(s):

V. A. Godyak ◽

R. B. Piejak

Keyword(s):

Radio Frequency ◽

Space Potential ◽

Radio Frequency Discharge ◽

Probe Measurements

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Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/22/022 ◽

2007 ◽

Vol 40 (22) ◽

pp. 7008-7018 ◽

Cited By ~ 92

Author(s):

J Schulze ◽

T Gans ◽

D O'Connell ◽

U Czarnetzki ◽

A R Ellingboe ◽

...

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Plasma Parameters ◽

Capacitively Coupled ◽

Radio Frequency Discharge

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