Application of a low-pressure radio frequency discharge source to polysilicon gate etching

1990 ◽  
Vol 8 (1) ◽  
pp. 1 ◽  
Author(s):  
J. M. Cook
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Discharge Source ◽  
Polysilicon Gate ◽  
Radio Frequency Discharge

Electron acceleration resonant with sheath motion in a low‐pressure radio frequency discharge

1994 ◽  
Vol 64 (13) ◽  
pp. 1623-1625 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Yasunori Ohtsu ◽  
Hiroharu Fujita
Keyword(s):  
Radio Frequency ◽  
Electron Acceleration ◽  
Low Pressure ◽  
Radio Frequency Discharge

The Microwave Admittance of a Mercury-Vapour Discharge

1952 ◽  
Vol 5 (4) ◽  
pp. 607
Author(s):  
HA Prime
Keyword(s):  
Radio Frequency ◽  
Discharge Current ◽  
Collision Frequency ◽  
Low Pressure ◽  
Complex Conductivity ◽  
Mercury Vapour ◽  
Microwave Method ◽  
Approximate Representation ◽  
Radio Frequency Discharge ◽  
Sustained Discharge

The normalized conductance and susceptance of a low-pressure mercury-vapour discharge hare been measured as a function of the discharge current at a frequency of c. 10,000 Mc/s. by a microwave method. The complex conductivity of the discharge is then calculated from the admittance data by representing the discharge as a shunt admittance loading the waveguide. The validity of this approximate representation is examined. The conductivity results are in agreement with similar published results and the similarity between the characteristics of a D.C. sustained discharge and a, radio-frequency discharge are noted. It is deduced that the collision frequency varies only slowly with change in discharge current.

Photoacoustics using radio-frequency laser-optogalvanic detection: a new technique for low-pressure photoacoustic spectroscopy. Magnetic predissociation of the state of I2

1986 ◽  
Vol 64 (9) ◽  
pp. 1107-1110 ◽  
Author(s):  
D. Kumar ◽  
L. Klasinc ◽  
P. L. Clancy ◽  
R. V. Nauman ◽  
S. P. McGlynn
Keyword(s):  
Acoustic Wave ◽  
Radio Frequency ◽  
Photoacoustic Spectroscopy ◽  
Low Pressure ◽  
New Technique ◽  
Acoustic Wave Sensor ◽  
Photoacoustic Measurement ◽  
Frequency Laser ◽  
A New Technique ◽  
Radio Frequency Discharge

A new technique for low-pressure photoacoustic spectroscopy, one in which a low-power radio-frequency discharge is used as a sensitive acoustic-wave sensor, is presented. This contactless technique is a variation of the laser-optogalvanic method and is termed PARFLOG (photoacoustics using radio-frequency laser-optogalvanic detection).The ability to prosecute low-pressure photoacoustic measurement at a reduced level of collisional perturbations enables us to study intramolecular processes such as level crossings, predissociation, field effects, etc. Results for magnetic predissociation of the [Formula: see text] state of iodine are presented.

Measurements of particle size kinetics from nanometer to micrometer scale in a low‐pressure argon‐silane radio‐frequency discharge

1992 ◽  
Vol 60 (2) ◽  
pp. 169-171 ◽  
Author(s):  
L. Boufendi ◽  
A. Plain ◽  
J. Ph. Blondeau ◽  
A. Bouchoule ◽  
C. Laure ◽  
...  
Keyword(s):  
Particle Size ◽  
Radio Frequency ◽  
Low Pressure ◽  
Micrometer Scale ◽  
Radio Frequency Discharge

scholarly journals Radio-Frequency Discharge at Low Pressure: A Non-local Problem Statement Approach

2016 ◽  
Vol 150 ◽  
pp. 1041-1045 ◽  
Author(s):  
V.T. Dubrovin ◽  
V.Ju. Chebakova ◽  
V.S. Zheltukhin
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Local Problem ◽  
Problem Statement ◽  
Non Local ◽  
Radio Frequency Discharge

Publisher's Note: High-voltage nanosecond pulses in a low-pressure radio-frequency discharge [Phys. Rev. E87, 063105 (2013)]

2013 ◽  
Vol 87 (6) ◽  
Author(s):  
M. Y. Pustylnik ◽  
L. Hou ◽  
A. V. Ivlev ◽  
L. M. Vasilyak ◽  
L. Couëdel ◽  
...  
Keyword(s):  
Radio Frequency ◽  
High Voltage ◽  
Low Pressure ◽  
Nanosecond Pulses ◽  
Radio Frequency Discharge
Sign in / Sign up

Export Citation Format

Share Document