High‐current‐density metal‐ion implantation

1992 ◽  
Vol 63 (4) ◽  
pp. 2491-2493 ◽  
Author(s):  
Paul J. Wilbur ◽  
Ronghua Wei
Keyword(s):  
Ion Implantation ◽  
Current Density ◽  
Metal Ion ◽  
High Current Density ◽  
High Current ◽  
Metal Ion Implantation

scholarly journals A broad-beam, high-current metal-ion implantation facility

1991 ◽  
Vol 55 (1-4) ◽  
pp. 506-510 ◽  
Author(s):  
I.G. Brown ◽  
M.R. Dickinson ◽  
J.E. Galvin ◽  
X. Godechot ◽  
R.A. MacGill
Keyword(s):  
Ion Implantation ◽  
Metal Ion ◽  
High Current ◽  
Broad Beam ◽  
Metal Ion Implantation

High current-density broad-beam boron ion implantation

1997 ◽  
Vol 96 (1) ◽  
pp. 52-57 ◽  
Author(s):  
P.J. Wilbur ◽  
J.A. Davis ◽  
D.L. Williamson ◽  
J.J. Vajo ◽  
R. Wei
Keyword(s):  
Ion Implantation ◽  
Current Density ◽  
High Current Density ◽  
High Current ◽  
Broad Beam
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