High current metal ion implantation to synthesize some conducting metal-silicides

1999 ◽  
Author(s):  
B. X. Liu ◽  
K. Y. Gao
Keyword(s):  
Ion Implantation ◽  
Metal Ion ◽  
High Current ◽  
Metal Silicides ◽  
Metal Ion Implantation

scholarly journals A broad-beam, high-current metal-ion implantation facility

1991 ◽  
Vol 55 (1-4) ◽  
pp. 506-510 ◽  
Author(s):  
I.G. Brown ◽  
M.R. Dickinson ◽  
J.E. Galvin ◽  
X. Godechot ◽  
R.A. MacGill
Keyword(s):  
Ion Implantation ◽  
Metal Ion ◽  
High Current ◽  
Broad Beam ◽  
Metal Ion Implantation

Some novel surface modification applications of a new kind of high current metal ion implantation facility

1991 ◽  
Vol 13 (3) ◽  
pp. 217-228 ◽  
Author(s):  
I. G. Brown ◽  
M. R. Dickinson ◽  
J. E. Galvin ◽  
X. Godechot ◽  
R. A. MacGill
Keyword(s):  
Surface Modification ◽  
Ion Implantation ◽  
Metal Ion ◽  
High Current ◽  
Metal Ion Implantation
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