Sputtering ion source with simultaneous use of microwave and Penning‐ionization‐gauge discharge

1990 ◽  
Vol 61 (1) ◽  
pp. 598-600 ◽  
Author(s):  
Yoshikazu Yoshida ◽  
Teruhito Ohnishi ◽  
Yuichi Hirofuji ◽  
Tanejiro Ikeda
Keyword(s):  
Ion Source ◽  
Penning Ionization ◽  
Ionization Gauge ◽  
Simultaneous Use

Characteristics of Penning ionization gauge type compact microwave metal ion source

1988 ◽  
Vol 6 (4) ◽  
pp. 2451-2456 ◽  
Author(s):  
Yoshikazu Yoshida ◽  
Teruhito Ohnishi ◽  
Yuichi Hirofuji
Keyword(s):  
Metal Ion ◽  
Ion Source ◽  
Penning Ionization ◽  
Ionization Gauge

Development of external electron-beam enhancement of the Penning ionization gauge ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A330
Author(s):  
W. He ◽  
H. W. Zhao ◽  
Zh. W. Liu ◽  
H. Y. Zhao ◽  
Y. Cao ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ion Source ◽  
Penning Ionization ◽  
Ionization Gauge

Effect of resonant microwave power on a Penning ionization gauge ion source

1985 ◽  
Vol 56 (10) ◽  
pp. 1894-1896 ◽  
Author(s):  
Ian G. Brown ◽  
James E. Galvin ◽  
Basil F. Gavin ◽  
Robert A. MacGill
Keyword(s):  
Microwave Power ◽  
Ion Source ◽  
Penning Ionization ◽  
Ionization Gauge

A slit-end extraction Penning ionization gauge ion source with a permanent magnet

2002 ◽  
Vol 73 (2) ◽  
pp. 852-853
Author(s):  
Song Zhizhong ◽  
Yu JinXiang ◽  
Dong Guocai ◽  
Zhang Jun ◽  
Wang Zhongyi ◽  
...  
Keyword(s):  
Permanent Magnet ◽  
Ion Source ◽  
Penning Ionization ◽  
Ionization Gauge

Low-Energy Penning Ionization Gauge Type Ion Source Assisted by RF Magnetron Discharge

2002 ◽  
Vol 41 (Part 1, No. 8) ◽  
pp. 5415-5418 ◽  
Author(s):  
Sergey N. Abolmasov ◽  
Alexandr A. Bizyukov ◽  
Yoshinobu Kawai ◽  
Andrei Y. Kashaba ◽  
Vasyl I. Maslov ◽  
...  
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Magnetron Discharge ◽  
Penning Ionization ◽  
Ionization Gauge
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