In situ fabricated Ga2O3–GaAs structures with low interface recombination velocity

1995 ◽  
Vol 66 (5) ◽  
pp. 625-627 ◽  
Author(s):  
M. Passlack ◽  
M. Hong ◽  
E. F. Schubert ◽  
J. R. Kwo ◽  
J. P. Mannaerts ◽  
...  
2015 ◽  
Vol 107 (5) ◽  
pp. 051601 ◽  
Author(s):  
Enrico Jarzembowski ◽  
Frank Syrowatka ◽  
Kai Kaufmann ◽  
Wolfgang Fränzel ◽  
Torsten Hölscher ◽  
...  

1996 ◽  
Vol 421 ◽  
Author(s):  
M. Passlack ◽  
M. Hong

AbstractWe have extended the spectrum of molecular-beam epitaxy (MBE) related techniques by introducing in-situ deposition of oxides. The oxide films have been deposited on clean, atomically ordered (100) GaAs wafer surfaces using molecular beams of gallium-, magnesium-, silicon-, or aluminum oxide. Among the fabricated oxide-GaAs heterostructures, Ga2O3-GaAs interfaces exhibit unique electronic properties including an interface state density Dit in the low 1010 cm−2eV−1 range and an interface recombination velocity S of 4000 cm/s. The formation of inversion layers in both n- and p-type GaAs has been clearly established. Further, thermodynamic and photochemical stability of excellent electronic interface properties of Ga2O3-GaAs structures has been demonstrated.


2007 ◽  
Vol 91 (4) ◽  
pp. 041112 ◽  
Author(s):  
A. Trita ◽  
I. Cristiani ◽  
V. Degiorgio ◽  
D. Chrastina ◽  
H. von Känel

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