Thin‐film temperature rise estimates during low energy ion bombardment in a plasma reactor
1993 ◽
Vol 11
(2)
◽
pp. 307-313
◽
Keyword(s):
Keyword(s):
1997 ◽
Vol 241-243
(1)
◽
pp. 1248-1252
1991 ◽
Vol 59-60
◽
pp. 1023-1027
◽
1998 ◽
Vol 143
(4)
◽
pp. 455-472
◽