Argon incorporation and silicon carbide formation during low energy argon‐ion bombardment of Si(100)
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1974 ◽
Vol 7
(5)
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pp. L75-L78
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2008 ◽
Vol 26
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pp. 522-536
2011 ◽
Vol 406
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pp. 3876-3884
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Vol 14
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pp. 033505
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1991 ◽
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Vol 58
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pp. 387-393
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Vol 56
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pp. 2568-2572
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