Visible luminescence from one‐ and two‐dimensional silicon structures produced by conventional lithographic and reactive ion etching techniques

1995 ◽  
Vol 66 (9) ◽  
pp. 1114-1116 ◽  
Author(s):  
A. G. Nassiopoulos ◽  
S. Grigoropoulos ◽  
E. Gogolides ◽  
D. Papadimitriou
Keyword(s):  
Reactive Ion Etching ◽  
Two Dimensional ◽  
Ion Etching ◽  
Visible Luminescence ◽  
Silicon Structures

Sub-Microstructures Formed by Means of Reactive Ion Etching in Multilayers of Two-Dimensional Fine-Particle Arrays

2002 ◽  
Vol 31 (5) ◽  
pp. 524-525 ◽  
Author(s):  
Sachiko I. Matsushita ◽  
Yoshie Yagi ◽  
Akira Fujishima
Keyword(s):  
Fine Particle ◽  
Reactive Ion Etching ◽  
Two Dimensional ◽  
Ion Etching

50−nm silicon structures fabricated with trilevel electron beam resist and reactive‐ion etching

1981 ◽  
Vol 39 (3) ◽  
pp. 268-270 ◽  
Author(s):  
L. D. Jackel ◽  
R. E. Howard ◽  
E. L. Hu ◽  
D. M. Tennant ◽  
P. Grabbe
Keyword(s):  
Electron Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Silicon Structures

Fabrication of InP Submicron Pillars for Two-Dimensional Photonic Crystals by Reactive Ion Etching

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 7172-7176 ◽  
Author(s):  
Hitoshi Hatate ◽  
Masayuki Hashimoto ◽  
Hirofumi Shirakawa ◽  
Yasufumi Fujiwara ◽  
Yoshikazu Takeda ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Reactive Ion Etching ◽  
Two Dimensional ◽  
Ion Etching
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